(19)

(11)

EP 3 469 625 A1

(12)

(43) Date of publication: 17.04.2019 Bulletin 2019/16 (21) Application number: 16904801.4 (22) Date of filing: 09.06.2016

(51) International Patent Classification (IPC):  H01L 21/447(2006.01) H01L 21/50(2006.01) H01L 21/02(2006.01) H01L 21/603(2006.01) (86) International application number: PCT/US2016/036593 (87) International publication number: WO 2017/213652 (14.12.2017 Gazette 2017/50)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: MA MD (71) Applicant: Innovative Micro Technology Goleta, CA 93117 (US)	(72) Inventors: GUDEMAN, Christopher Lompoc, California 93436 (US) RUBEL, Paul Santa Barbara, California 93109 (US) (74) Representative: Kisters, Michael Marcus  Patentanwalt Schimmelstrasse 12 44309 Dortmund 44309 Dortmund (DE)