(19)

(11)

EP 3 475 463 A1

(12)

(43) Date of publication: 01.05.2019 Bulletin 2019/18 (21) Application number: 17730217.1 (22) Date of filing: 20.06.2017

(51) International Patent Classification (IPC):  C23C 18/06(2006.01) C23C 18/12(2006.01) C23C 18/08(2006.01) (86) International application number: PCT/EP2017/065108 (87) International publication number: WO 2017/220590 (28.12.2017 Gazette 2017/52)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: MA MD (30) Priority: 22.06.2016 EP 16175742 (71) Applicant: The University Of Warwick Coventry CV4 8UW (GB)	(72) Inventors: CHERKASOV, Nikolay Coventry CV3 4DS (GB) REBROV, Evgeny Coventry CV4 9JS (GB) IBHADON, Alex Kingston-upon-Hull HU6 7RX (GB) (74) Representative: Hartley, Andrew Philip et al Mathisen & Macara LLP Communications House South Street Staines-upon-Thames, Middx TW18 4PR Staines-upon-Thames, Middx TW18 4PR (GB)