| (84) |
Designated Contracting States: |
|
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
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Designated Extension States: |
|
BA ME |
|
Designated Validation States: |
|
MA MD |
| (71) |
Applicants: |
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- Dow Global Technologies, LLC
Midland, MI 48674 (US)
- Rohm and Haas Electronic Materials LLC
Marlborough, MA 01752 (US)
|
|
| (72) |
Inventors: |
|
- HU, Nan
Shanghai 201210 (CN)
- WANG, Jinfei
Shanghai 200237 (CN)
- HAGA, Mitsuru
Niigata-ken 9591513 (JP)
- CHEN, Hongyu
Midland, MI 48674 (US)
- RAO, Yuanqiao
Lake Jackson, Texas 77566 (US)
- ZHANG, Yi
Shanghai, 200042 (CN)
|
| (74) |
Representative: Houghton, Mark Phillip |
|
Patent Outsourcing Limited
Cornerhouse
1 King Street
Bakewell
Derbyshire DE45 1DZ
Bakewell
Derbyshire DE45 1DZ (GB) |
|
