(19)
(11) EP 3 485 249 A1

(12)

(43) Date of publication:
22.05.2019 Bulletin 2019/21

(21) Application number: 17836522.7

(22) Date of filing: 01.08.2017
(51) International Patent Classification (IPC): 
G01L 7/00(2006.01)
G01L 9/00(2006.01)
 G01L 7/08(2006.01)
A61M 5/14(2006.01)
(86) International application number:
PCT/IL2017/050851
(87) International publication number:
WO 2018/025264 (08.02.2018 Gazette 2018/06)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
MA MD

(30) Priority: 03.08.2016 US 201615227278

(71) Applicant: Ezmems Ltd.
4216102 Netanya (IL)

(72) Inventors:
  • SHMILOVICH, Tsvi
    3751078 Pardes Hanna-Karkur (IL)
  • MOLINAZZI, Nicola
    4423149 Kfar Sava (IL)

(74) Representative: Becker Kurig Straus 
Patentanwälte Bavariastrasse 7
80336 München
80336 München (DE)

   


(54) FLUIDIC MICROELECTROMECHANICAL SENSORS/DEVICES AND FABRICATION METHODS THEREOF