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EP 3 485 505 A1

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(43) Date of publication: 22.05.2019 Bulletin 2019/21 (21) Application number: 17755560.4 (22) Date of filing: 12.07.2017

(51) International Patent Classification (IPC):  H01L 21/02(2006.01) H01L 33/00(2010.01) H01L 21/762(2006.01) (86) International application number: PCT/IB2017/054209 (87) International publication number: WO 2018/011731 (18.01.2018 Gazette 2018/03)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: MA MD (30) Priority: 12.07.2016 US 201662361468 P 28.07.2016 US 201662367911 P 06.07.2017 US 201715643370 06.07.2017 US 201715643384 (71) Applicant: Qmat, Inc. Santa Clara, California 95051 (US)

(72) Inventor: HENLEY, Francois, J. Saratoga California 95070 (US) (74) Representative: White, Andrew John et al Mathys & Squire LLP The Shard 32 London Bridge Street GB-London SE1 9SG GB-London SE1 9SG (GB)