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(11)

EP 3 488 225 A1

(12)

(43) Date of publication: 29.05.2019 Bulletin 2019/22 (21) Application number: 17835081.5 (22) Date of filing: 25.07.2017

(51) International Patent Classification (IPC):  G01N 21/31(2006.01) G01N 1/24(2006.01) G01N 21/01(2006.01) (86) International application number: PCT/US2017/043588 (87) International publication number: WO 2018/022542 (01.02.2018 Gazette 2018/05)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: MA MD (30) Priority: 25.07.2016 US 201662366594 P (71) Applicant: MKS Instruments, Inc. Andover, MA 01810 (US)	(72) Inventors: ZEMEK, Peter Groton, Massachusetts 01450 (US) CARANGELO, Robert M. Glastonbury, Connecticut 06033 (US) YE, Hongke Chelmsford, Massachusetts 01824 (US) WRIGHT, Andrew North Andover, Massachusetts 01845 (US) (74) Representative: Small, Gary James  Carpmaels & Ransford LLP One Southampton Row London WC1B 5HA London WC1B 5HA (GB)