(19)
(11) EP 3 490 750 A1

(12)

(43) Date of publication:
05.06.2019 Bulletin 2019/23

(21) Application number: 17835014.6

(22) Date of filing: 21.07.2017
(51) International Patent Classification (IPC): 
B23K 26/0622(2014.01)
B23K 101/36(2006.01)
 B23K 26/06(2014.01)
(86) International application number:
PCT/US2017/043229
(87) International publication number:
WO 2018/022441 (01.02.2018 Gazette 2018/05)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
MA MD

(30) Priority: 28.07.2016 US 201662368053 P

(71) Applicant: Electro Scientific Industries, Inc.
Portland, OR 97229 (US)

(72) Inventors:
  • FINN, Daragh
    Portland, OR 97229 (US)
  • KYSLINGER, Michael
    Portland, OR 97229 (US)
  • KLEINERT, Jan
    Portland, OR 97229 (US)
  • LIN, Zhibin
    Portland, OR 97229 (US)
  • LIN, Zhibin
    Portland, OR 97229 (US)

(74) Representative: HGF Limited 
8th Floor 140 London Wall
London EC2Y 5DN
London EC2Y 5DN (GB)

   


(54) LASER PROCESSING APPARATUS AND METHODS OF LASER-PROCESSING WORKPIECES