TECHNICAL FIELD
[0001] Embodiments of the inventive concepts described herein relate to a plasma treatment
apparatus.
BACKGRAOUND
[0002] Recently, attempts have been made to treat skin diseases such as acne and an atopic
skin disease with plasma. Plasma refers to a state in which matter is divided into
electrons with negative charges and ions with positive charges. In plasma, reactivity
is maximized so that ionization and recombination of matter are actively performed.
Plasma exhibits an effect of improving an affected part through sterilization, skin
regeneration, and the like.
[0003] However, despite the beneficial effects of plasma, treatment apparatuses using plasma
have not been widely studied and developed. As a result, there are not many related
products and consumers do not have a wide choice of plasma treatment apparatuses.
SUMMARY
TECHNICAL PROBLEM
[0004] Embodiments of the inventive concepts provide a plasma treatment apparatus that treats
a body part such as skin or a wound using plasma.
TECHNICAL SOLUTION
[0005] According to an exemplary embodiment, a plasma treatment apparatus includes a cover
attached to a body part, a plasma generation unit that generates plasma and provides
the plasma to the cover, a gas supply unit that supplies a source gas for generating
the plasma to the plasma generation unit, and an exhaust unit that exhausts an exhaust
gas from the cover.
[0006] The cover may include a mask manufactured in advance to cover a face.
[0007] The cover may include a pad manufactured in advance to cover a wound.
[0008] The cover may include, at an edge, a sealing part brought into close contact with
the body part to seal a space between the cover and the body part.
[0009] The cover may further include, on a portion facing the body part, a spacing part
for maintaining spacing between the cover and the body part.
[0010] The plasma generation unit may be separated from the cover and may provide the plasma
to the cover through a tube that connects the plasma generation unit and the cover.
[0011] The plasma generation unit may be installed on the cover and may provide the plasma
into a space between the cover and the body part.
[0012] The plasma generation unit may include opposite electrodes disposed to face each
other.
[0013] The gas supply unit may include a fan unit that generates an air flow from a space
between the opposite electrodes to the space between the cover and the body part.
[0014] The plasma generation unit may further include an ozone absorption unit that absorbs
ozone between the opposite electrodes and the space between the cover and the body
part.
[0015] The ozone absorption unit may include a filter with manganese dioxide.
[0016] The plasma generation unit may further include a medicine supply unit that supplies
a medicine between the opposite electrodes and the space between the cover and the
body part.
[0017] The medicine supply unit may include a medicine plate with one surface facing the
body part and an opposite surface to which the medicine is applied, the medicine plate
having a hole through which the plasma mixed with the medicine is sent into the space
between the cover and the body part.
[0018] A medicine may be applied to at least part of one surface of the cover that faces
the body part.
[0019] The plasma generation unit may be integrated with the cover and may generate the
plasma in a space between the cover and the body part.
[0020] The plasma generation unit may include a first electrode formed on an opposite surface
of a dielectric material constituting the cover, the opposite surface being opposite
to one surface of the dielectric material that faces the body part, and a second electrode
formed on the one surface of the dielectric material.
[0021] The first electrode may cover at least a partial area on the opposite surface of
the dielectric material, and the second electrode on the one surface of the dielectric
material may cover part of an area that faces the first electrode.
[0022] A power signal may be applied to the first electrode, and the second electrode may
be grounded.
[0023] The cover may further include a shielding part that shields the first electrode.
[0024] The cover may further include a medicine applied to the one surface of the dielectric
material.
[0025] The medicine may be applied to at least part of a space formed by the one surface
of the dielectric material and the second electrode.
[0026] The medicine may be applied to a groove formed in at least part of an area on the
one surface of the dielectric material that is not covered with the second electrode.
[0027] The gas supply unit may supply the source gas to the cover through a gas supply tube.
[0028] The gas supply unit may supply air or an inert gas to the plasma generation unit.
[0029] The exhaust unit may exhaust air from a space between the cover and the body part
before the plasma generation unit generates the plasma after the cover is attached
to the body part.
[0030] The plasma treatment apparatus may further include a by-product removal unit that
removes a by-product from the exhaust gas, a sensor unit that detects whether the
body part is sealed by the cover, and a controller that controls the plasma generation
unit, depending on whether the body part is sealed or not.
[0031] The sensor unit may include at least one contact sensor that is provided on a boundary
surface of the cover that makes contact with the body part and that detects whether
the boundary surface and the body part are brought into contact with, or separated
from, each other.
[0032] The controller may stop an operation of the plasma generation unit when the boundary
surface and the body part are separated from each other.
[0033] The controller may stop the operation of the plasma generation unit when any one
of a plurality of contact sensors detects that the boundary surface and the body part
are separated from each other.
[0034] The controller may restart the operation of the plasma generation unit when the boundary
surface and the body part are brought into contact with each other again.
[0035] The exhaust unit may include a variable suction pump that takes in the exhaust gas
from a space between the cover part and the body part, the variable suction pump being
variable in suction pressure.
[0036] When the boundary surface and the body part are separated from each other, the controller
may raise the suction pressure of the variable suction pump and may stop an operation
of the variable suction pump after preset time passes.
[0037] The controller may restart the operation of the variable suction pump when the boundary
surface and the body part are brought into contact with each other again.
[0038] The cover may be configured such that a supply hole through which the cover receives
the plasma from the plasma generation unit or receives air from the gas supply unit
has a larger area than an exhaust hole through which the exhaust gas is discharged
to the exhaust unit.
[0039] The cover may further include an exhaust hole adjustment unit that hides or opens
part of the exhaust hole to adjust the area of the exhaust hole.
[0040] When the boundary surface and the body part are separated from each other, the controller
may control the exhaust hole adjustment unit to open part of the exhaust hole to increase
the area of the exhaust hole.
[0041] When the boundary surface and the body part are brought into contact with each other
again, the controller may control the exhaust hole adjustment unit to hide part of
the exhaust hole to decrease the area of the exhaust hole.
[0042] According to an exemplary embodiment, a plasma treatment apparatus includes a plasma
generation unit that generates plasma, a gas supply unit that supplies a source gas
for generating the plasma to the plasma generation unit, a path-providing unit that
provides a path along which the plasma generation unit moves above a body part, and
a driving unit that moves the plasma generation unit along the path-providing unit.
[0043] The plasma generation unit may include a first electrode having an empty space through
which the source gas passes, a dielectric material that surrounds the first electrode,
and a second electrode that surrounds at least part of the dielectric material.
[0044] The gas supply unit may supply at least one of argon and helium to the plasma generation
unit.
[0045] The path-providing unit may include a rail that supports a wheel included in the
plasma generation unit.
[0046] The path-providing unit may provide a linear path above the body part.
[0047] The path-providing unit may provide a closed loop path above the body part.
[0048] The path-providing unit may provide, above one or more predetermined intensive care
areas of the body part, an intensive care area path in which a first partial path
extending in a first direction, a turning path that turns from the first direction
to a second direction opposite to the first direction, and a second partial path extending
in the second direction are successively connected.
[0049] The path-providing unit may provide closed loop paths to a plurality of predetermined
intensive care areas of the body part, respectively.
[0050] The driving unit may include a wheel 241 included in the plasma generation unit and
supported by the path-providing unit and a motor included in the plasma generation
unit to rotate the wheel.
[0051] The plasma treatment apparatus may further include a medicine spray unit that sprays
a medicine while moving along the path-providing unit.
[0052] The medicine spray unit following the plasma generation unit may spray the medicine
to the body part after the plasma generation unit provides the plasma to the body
part.
[0053] The plasma treatment apparatus may further include a heater that radiates heat while
moving along the path-providing unit.
[0054] The heater ahead of the plasma generation unit may transfer heat to the body part
before the plasma generation unit provides the plasma to the body part.
[0055] The plasma treatment apparatus may further include a medicine mixing unit that has
a medicine received therein and is fastened to the plasma generation unit to mix the
medicine with the plasma.
[0056] The medicine mixing unit may include a fastening part fastened to a nozzle through
which the plasma is discharged from the plasma generation unit, a medicine receiving
part that receives the medicine, and a discharging part that discharges the plasma
mixed with the medicine.
[0057] The fastening part may be screw-coupled to the nozzle.
[0058] The fastening part may be coupled to a thread formed on the nozzle, the pitch of
which is formed in a direction parallel to a nozzle axis.
[0059] The medicine receiving part may be formed inside the medicine mixing unit and may
receive the medicine in a space formed on a transfer path for transferring the plasma
from the nozzle to the discharging part.
[0060] The medicine receiving part may be formed inside the medicine mixing unit and may
receive the medicine on a transfer path for transferring the plasma from the nozzle
to the discharging part.
[0061] The transfer path may include a straight tube extending from the nozzle in a straight
line.
[0062] The transfer path may include a curved tube extending from the nozzle in a curve
shape.
[0063] The curved tube may extend on a virtual plane where the nozzle and the discharging
part are located.
[0064] The curved tube may be formed to be wound around a virtual line that connects the
nozzle and the discharging part.
[0065] The transfer path may include a bent tube extending from the nozzle in a broken line
shape.
[0066] The bent tube may extend on a virtual plane where the nozzle and the discharging
part are located.
[0067] The bent tube may be formed to be wound around a virtual line that connects the nozzle
and the discharging part.
[0068] The medicine receiving part may include, in a portion corresponding to a vertex of
the bent tube, a cavity for receiving the medicine.
ADVANTAGEOUS EFFECTS
[0069] According to the embodiments of the inventive concept, the plasma treatment apparatuses
described above may treat a body part such as skin or a wound using plasma, thereby
effectively removing harmful germs in an affected part and promoting regeneration
of tissues.
BRIEF DESCRIPTION OF THE FIGURES
[0070]
FIG. 1 is a block diagram illustrating a plasma treatment apparatus according to an
embodiment of the inventive concept;
FIGS. 2 to 4 are a front view, a side view, and a sectional view illustrating a cover
according to an embodiment of the inventive concept;
FIGS. 5 and 6 are a front view and a sectional view illustrating a cover according
to another embodiment of the inventive concept;
FIG. 7 is a view illustrating an operation of the plasma treatment apparatus according
to an embodiment of the inventive concept;
FIG. 8 is a view illustrating a plasma treatment apparatus according to another embodiment
of the inventive concept;
FIG. 9 is a schematic partial sectional view illustrating a plasma generation unit
according to another embodiment of the inventive concept;
FIGS. 10 and 11 are a sectional view and a plan view illustrating a medicine supply
unit according to another embodiment of the inventive concept;
FIG. 12 is a front view illustrating a cover having a medicine applied to one surface
thereof according to an embodiment of the inventive concept;
FIG. 13 is a schematic partial sectional view illustrating a plasma generation unit
according to yet another embodiment of the inventive concept;
FIGS. 14 and 15 are partial sectional views illustrating a plasma generation unit
according to yet another embodiment of the inventive concept;
FIG. 16 is a partial sectional view illustrating a plasma generation unit further
including a medicine according to an embodiment of the inventive concept;
FIG. 17 is a partial sectional view illustrating a plasma generation unit further
including a medicine according to another embodiment of the inventive concept;
FIG. 18 is a partial sectional view illustrating a plasma generation unit further
including a medicine according to yet another embodiment of the inventive concept;
FIG. 19 is a view illustrating an operation of a plasma treatment apparatus according
to yet another embodiment of the inventive concept;
FIG. 20 is a flowchart illustrating a process in which a controller controls an operation
of a plasma treatment apparatus according to an embodiment of the inventive concept;
FIG. 21 is a block diagram illustrating a plasma treatment apparatus according to
another embodiment of the inventive concept;
FIG. 22 is a front view illustrating a cover in a plasma treatment apparatus according
to another embodiment of the inventive concept, with a boundary surface and a body
part making contact with each other;
FIG. 23 is a front view illustrating the cover in the plasma treatment apparatus according
to another embodiment of the inventive concept, with the boundary surface and the
body part separated from each other;
FIG. 24 is a flowchart illustrating a process in which a controller controls a plasma
generation unit according to another embodiment of the inventive concept;
FIG. 25 is a flowchart illustrating a process in which a controller controls an exhaust
unit according to another embodiment of the inventive concept;
FIG. 26 is a front view illustrating a cover in a plasma treatment apparatus according
to yet another embodiment of the inventive concept, with a boundary surface and a
body part making contact with each other;
FIG. 27 is a front view illustrating the cover in the plasma treatment apparatus according
to yet another embodiment of the inventive concept, with the boundary surface and
the body part making contact with each other;
FIG. 28 is a flowchart illustrating a process in which a controller controls an exhaust
hole adjustment unit according to yet another embodiment of the inventive concept;
FIG. 29 is a side view illustrating a plasma treatment apparatus according to an embodiment
of the inventive concept;
FIG. 30 is a sectional view illustrating a plasma generation unit according to an
embodiment of the inventive concept;
FIGS. 31 and 32 are plan views illustrating the plasma treatment apparatus including
a path-providing unit according to an embodiment of the inventive concept;
FIG. 33 is a plan view illustrating the plasma treatment apparatus including a path-providing
unit according to another embodiment of the inventive concept;
FIG. 34 is a plan view illustrating the plasma treatment apparatus including a path-providing
unit according to yet another embodiment of the inventive concept;
FIG. 35 is a plan view illustrating the plasma treatment apparatus including a path-providing
unit according to yet another embodiment of the inventive concept;
FIG. 36 is a sectional view illustrating a path-providing unit and a driving unit
according to an embodiment of the inventive concept;
FIG. 37 is a side view illustrating the path-providing unit and a wheel according
to an embodiment of the inventive concept, when viewed in the direction A of FIG.
36;
FIG. 38 is a side view illustrating a plasma treatment apparatus according to another
embodiment of the inventive concept;
FIG. 39 is a plan view illustrating the plasma treatment apparatus according to another
embodiment of the inventive concept;
FIG. 40 is a side view illustrating a plasma treatment apparatus according to yet
another embodiment of the inventive concept;
FIG. 41 is a plan view illustrating the plasma treatment apparatus according to yet
another embodiment of the inventive concept;
FIG. 42 is a side view illustrating a plasma treatment apparatus according to yet
another embodiment of the inventive concept;
FIGS. 43 and 44 are a perspective view and a sectional view illustrating a medicine
mixing unit according to an embodiment of the inventive concept;
FIGS. 45 and 46 are a sectional view and a side view illustrating the medicine mixing
unit according to an embodiment of the inventive concept;
FIGS. 47 to 49 are sectional views illustrating medicine receiving parts and medicines
M received therein according to embodiments of the inventive concept;
FIG. 50 is a schematic view illustrating transfer paths according to various embodiments
of the inventive concept; and
FIG. 51 is a sectional view illustrating a transfer path and a cavity formed therein
according to yet another embodiment of the inventive concept.
DETAILED DESCRIPTION
[0071] Other advantages and features of the inventive concept, and implementation methods
thereof will be clarified through the following embodiments to be described in detail
with reference to the accompanying drawings. The inventive concept may, however, be
embodied in different forms and should not be construed as being limited to the embodiments
set forth herein. Rather, these embodiments are provided so that this disclosure is
thorough and complete and fully conveys the scope of the inventive concept to a person
skilled in the art to which the inventive concept pertains. Further, the inventive
concept is only defined by the appended claims.
[0072] Even though not defined, all terms used herein (including technical or scientific
terms) have the same meanings as those generally accepted by general technologies
in the related art to which the inventive concept pertains. The terms defined in general
dictionaries may be construed as having the same meanings as those used in the related
art and/or a text of the present application and even when some terms are not clearly
defined, they should not be construed as being conceptual or excessively formal.
[0073] Terms used herein are only for description of embodiments and are not intended to
limit the inventive concept. As used herein, the singular forms are intended to include
the plural forms as well, unless context clearly indicates otherwise. It will be further
understood that the terms "comprise" and/or "comprising" used herein specify the presence
of stated features or components, but do not preclude the presence or addition of
one or more other features or components. In the specification, the term "and/or"
indicates each of listed components or various combinations thereof.
[0074] Hereinafter, embodiments of the inventive concept will be described in detail with
reference to the accompanying drawings.
[0075] FIG. 1 is a block diagram illustrating a plasma treatment apparatus 1 according to
an embodiment of the inventive concept.
[0076] Referring to FIG. 1, the plasma treatment apparatus 1 includes a cover 11, a plasma
generation unit 12, a gas supply unit 13, and an exhaust unit 14. The cover 11 is
attached to a body part. The plasma generation unit 12 generates plasma and provides
the plasma to the cover 11. The gas supply unit 13 supplies, to the plasma generation
unit 12, a source gas for generating the plasma. The exhaust unit 14 exhausts an exhaust
gas from the cover 11.
[0077] FIGS. 2 to 4 are a front view, a side view, and a sectional view illustrating the
cover 11 according to an embodiment of the inventive concept.
[0078] According to an embodiment of the inventive concept, the cover 11 may include a mask
manufactured in advance to cover a face. That is, the cover 11 in this embodiment
may be manufactured in a mask type and may be applied to the face.
[0079] The cover 11 may include a sealing part 111 at the edge thereof. Referring to FIGS.
2 to 4, the sealing part 111 may be brought into close contact with the body part
at the edge of the cover 11 to seal the space between the cover 11 and the body part.
[0080] To seal the space between the cover 11 and the body part, the sealing part 111 may
be formed of a soft and flexible material and may be brought into close contact with
the body part so that air cannot get in or out. For example, the sealing part 111
may be formed of silicone, rubber, a resin, or the like.
[0081] In the case where the cover 11 is manufactured in a mask type, the sealing part 111
may be provided not only at the outer periphery of the mask but also at the edges
of various holes (eye holes, a nose hole, a mouth hole, and the like) to seal the
space between the mask and the face.
[0082] Furthermore, the cover 11 may further include a spacing part 112. The spacing part
112 may be provided on a portion (e.g., the inside) of the cover 11 that faces the
body part and may maintain the spacing between the cover 11 and the body part.
[0083] As illustrated in FIG. 2, the cover 11 may have a plurality of spacing parts 112
on a portion thereof that faces the body part. As described above, the spacing parts
112 may be provided on predetermined portions on the inside of the cover 11, and therefore
the inside of the cover 11 may be kept spaced apart from the body part by a predetermined
distance without adhering to the body part during treatment using plasma.
[0084] FIGS. 5 and 6 are a front view and a sectional view illustrating the cover 11 according
to another embodiment of the inventive concept.
[0085] According to another embodiment of the inventive concept, the cover 11 may include
a pad manufactured in advance to cover a wound. That is, the cover 11 in this embodiment
may be manufactured in a pad type and may be applied to the wound.
[0086] Unlike the cover 11 of a mask type, which is manufactured to match a facial contour,
the cover 11 according to this embodiment may be manufactured in a flat surface shape
or a curved surface shape with a predetermined curvature.
[0087] Likewise to the cover 11 of a mask type, the cover 11 of a pad type, as illustrated
in FIGS. 5 and 6, may include the sealing part 111 at the edge thereof and may further
include the spacing parts 112 on a portion thereof that faces the body part.
[0088] FIG. 7 is a view illustrating an operation of the plasma treatment apparatus 1 according
to an embodiment of the inventive concept.
[0089] The plasma generation unit 12 generates plasma and provides the plasma to the cover
11. According to an embodiment of the inventive concept, the plasma generation unit
12 may be separated from the cover 11 and may provide the plasma to the cover 11 through
a tube 113 that connects the plasma generation unit 12 and the cover 11. That is,
the cover 11 and the plasma generation unit 12 in this embodiment may be manufactured
as separate modules and may be connected together through the tube 113.
[0090] The plasma generation unit 12 may include two opposite electrodes facing each other
and may supply power to the opposite electrodes to discharge gas between the electrodes.
Plasma generated by the discharge of the gas is transferred to the cover 11 through
the tube 113.
[0091] At this time, the gas supply unit 13 supplies a source gas to the plasma generation
unit 12. According to an embodiment of the inventive concept, the gas supply unit
13 may supply air as the source gas. In this case, the plasma generation unit 12 generates
atmospheric plasma. According to another embodiment of the inventive concept, the
gas supply unit 13 may supply an inert gas as the source gas. For example, the gas
supply unit 13 may supply at least one of argon and helium to the plasma generation
unit 12. In this case, the plasma generation unit 12 generates argon or helium plasma.
[0092] Furthermore, the exhaust unit 14 exhausts an exhaust gas from the cover 11. By-products
may be generated in the process in which the plasma provided from the plasma generation
unit 12 to the cover 11 is applied to the body part. For example, the plasma may generate
ozone while making contact with air inside the cover 11. In addition, when the plasma
generation unit 12 receives air as the source gas, the plasma generation unit 12 may
generate and provide plasma and ozone to the cover 11.
[0093] The exhaust unit 14 may take in an exhaust gas including the by-products from the
cover 11 and may discharge the exhaust gas out of the cover 11. To this end, the exhaust
unit 14 may be connected to the cover 11 through an exhaust tube 114 and may include
a suction pump to apply a negative pressure to the space between the cover 11 and
the body part.
[0094] FIG. 8 is a view illustrating the plasma treatment apparatus 1 according to another
embodiment of the inventive concept.
[0095] According to another embodiment of the inventive concept, the plasma generation unit
12 may be installed on the cover 11 and may provide plasma into the space between
the cover 11 and a body part. That is, the plasma generation unit 12 in this embodiment
is installed on the cover 11 rather than being separated from the cover 11, and therefore
the cover 11 and the plasma generation unit 12 are provided together.
[0096] While FIG. 8 illustrates an example that the plasma generation unit 12 is installed
on a forehead part of the cover 11 of a mask type, the location where the plasma generation
unit 12 is installed on the cover 11 is not limited thereto.
[0097] As described above, even in this embodiment, the plasma generation unit 12 may include
opposite electrodes disposed to face each other. Although not illustrated in the drawing,
the plasma generation unit 12 may include a power supply and may supply, to the opposite
electrodes, power for generating plasma.
[0098] FIG. 9 is a schematic partial sectional view illustrating the plasma generation unit
12 according to another embodiment of the inventive concept.
[0099] As described above, the plasma generation unit 12 in this embodiment is installed
on the cover 11 to directly provide plasma to the cover 11 except through a tube.
[0100] Furthermore, according to this embodiment, the gas supply unit 13 may also be installed
on the cover 11 together with the plasma generation unit 12 rather than being connected
to the plasma generation unit 12 through a tube.
[0101] Specifically, referring to FIG. 9, the gas supply unit 13 may include a fan unit
131 that generates an air flow from the plasma generation unit 12, that is, the space
between opposite electrodes 121 to the space between the cover 11 and the body part.
[0102] The fan unit 131 in this embodiment may rotate a fan to supply air to the opposite
electrodes 121 as a source gas and move plasma generated by the opposite electrodes
121 inside the cover 11 when power is supplied to the opposite electrodes 121 and
discharge occurs in the space between the opposite electrodes 121.
[0103] Furthermore, the plasma generation unit 12 may further include an ozone absorption
unit 122. The ozone absorption unit 122 is disposed in the space between the opposite
electrodes 121, the cover 11, and the body part to absorb ozone.
[0104] As described above, in the case where the plasma generation unit 12 receives air
as a source gas and generates plasma, the plasma generation unit 12 may further generate
ozone as by-products, in addition to the plasma. The plasma generation unit 12 in
this embodiment may further include the ozone absorption unit 122 between the opposite
electrodes 121 and the cover 11, thereby reducing ozone content in the plasma that
is provided to the cover 11.
[0105] According to this embodiment, the ozone absorption unit 122 may include a filter
having a material for absorbing ozone. For example, the ozone absorption unit 122
may include a filter having manganese dioxide, but the ozone-absorbing material included
in the filter is not limited to manganese dioxide.
[0106] In addition, the plasma generation unit 12 may further include a medicine supply
unit 123. The medicine supply unit 123 is disposed in the space between the opposite
electrodes 121, the cover 11, and the body part to supply a medicine.
[0107] FIGS. 10 and 11 are a sectional view and a plan view illustrating the medicine supply
unit 123 according to another embodiment of the inventive concept.
[0108] According to this embodiment, the medicine supply unit 123 may include a medicine
plate 1231 having holes H formed therethrough, and a medicine M may be applied to
a surface of the medicine plate 1231 that is opposite to a surface facing the body
part.
[0109] For example, referring to FIG. 10, the medicine plate 1231 may be disposed between
the opposite electrodes 121 for generating plasma and the cover 11, and the medicine
M may be applied to the surface (the upper surface in FIG. 10) of the medicine plate
1231, which is opposite to the surface facing the body part, to form a layer with
a predetermined thickness.
[0110] As illustrated in FIG. 10, the medicine plate 1231 may have the holes H formed there
through in the thickness direction and may supply plasma mixed with the medicine M
into the space between the cover 11 and the body part. As illustrated in FIG. 11,
the holes H may be evenly formed in the medicine plate 1231. Without being limited
thereto, however, the holes H may be unevenly formed in the medicine plate 1231.
[0111] According to this embodiment, plasma generated by and moving downward from the opposite
electrodes 121 may be mixed with the medicine M applied to the medicine plate 1231
and may be supplied to the cover 11 through the holes H, and therefore the effect
of the plasma acting on the body part may be further improved.
[0112] In the case where the plasma and the medicine M are mixed together and supplied to
the body part, the plasma treatment apparatus 1 may enhance the plasma's unique actions
such as sterilization and regeneration, thereby maximizing treatment effects by the
plasma.
[0113] The medicine M in the embodiment of the inventive concept includes any medicine used
for treating a body part.
[0114] For example, in the case where the plasma treatment apparatus 1 is used for skin
care, the medicine supply unit 123 may provide a skin care agent as the medicine M
and may mix the skin care agent with plasma. In another example, when the plasma treatment
apparatus 1 is used for burn treatment, the medicine supply unit 123 may provide a
burn treatment agent as the medicine M and may mix the burn treatment agent with plasma.
[0115] In yet another example, the medicine supply unit 123 may provide hydrogen peroxide
as the medicine M. For example, gel-type hydrogen peroxide with a predetermined concentration
may be applied to the upper surface of the medicine plate 1231. In this case, the
plasma treatment apparatus 1 may supply plasma generated by the plasma generation
unit 12 to the cover 11 through the medicine supply unit 123 to provide the plasma
mixed with the hydrogen peroxide to the body part, thereby further improving sterilization
effects of the plasma.
[0116] In addition, the medicine M may be applied to at least a portion of a surface of
the cover 11 that faces the body part.
[0117] FIG. 12 is a front view illustrating the cover 11 having the medicine M applied to
one surface thereof according to an embodiment of the inventive concept.
[0118] As illustrated in FIG. 12, the plasma treatment apparatus 1 may have the medicine
supply unit 123 included in the plasma generation unit 12, and the medicine M may
be applied to one surface (that is, the inside) of the cover 11 that faces a body
part.
[0119] As a result, plasma supplied from the plasma generation unit 12 may be sufficiently
mixed with the medicine M while moving toward the edge of the cover 11 and spreading
over the entire area of the cover 11, and therefore enhanced effects of the plasma
may be kept during treatment.
[0120] FIG. 13 is a schematic partial sectional view illustrating the plasma generation
unit 12 according to yet another embodiment of the inventive concept.
[0121] The plasma generation unit 12 illustrated in FIG. 9 has the fan unit 131 that is
installed as the gas supply unit 13 to supply air to the opposite electrodes 121.
[0122] In contrast, according to yet another embodiment of the inventive concept, the fan
unit 131 is not installed in the plasma generation unit 12, but the gas supply unit
13 may be connected to the plasma generation unit 12 through a tube to supply a source
gas to the opposite electrodes 121.
[0123] This embodiment may be applied in the case where an inert gas such as argon or helium,
rather than air, is supplied as the source gas. In the case where an inert gas is
used as the source gas, the opposite electrodes 121 do not generate ozone when generating
plasma. Therefore, the plasma generation unit 12 may not include the ozone absorption
unit 122 and may include only the medicine supply unit 123, unlike in the embodiment
of FIG. 9.
[0124] In the above-described embodiments, the cover 11 and the plasma generation unit 12
are separately manufactured and connected through the tube 113, or the plasma generation
unit 12 is installed on the cover 11.
[0125] However, according to yet another embodiment of the inventive concept, the plasma
generation unit 12 may be integrated with the cover 11 and may generate plasma in
the space between the cover 11 and the body part.
[0126] FIGS. 14 and 15 are partial sectional views illustrating the plasma generation unit
12 according to yet another embodiment of the inventive concept.
[0127] According to yet another embodiment of the inventive concept, the plasma generation
unit 12 may include a first electrode 1211 and a second electrode 1212. The first
electrode 1211 may be formed on an opposite surface of a dielectric material 1101
that is opposite to one surface thereof that faces a body part, and the second electrode
1212 may be formed on the one surface of the dielectric material 1101. The dielectric
material 1101 may constitute the cover 11. That is, the plasma generation unit 12
in this embodiment may include the first electrode 1211 and the second electrode 1212
facing each other with the dielectric material 1101 therebetween, which constitutes
the cover 11.
[0128] According to this embodiment, the first electrode 1211 covers at least a partial
area on the opposite surface of the dielectric material 1101. The second electrode
1212 on the one surface of the dielectric material 1101 covers part of the area that
faces the first electrode 1211.
[0129] For example, as illustrated in FIG. 14, the first electrode 1211 is formed to cover
all or part of the upper surface of the dielectric material 1101 that constitutes
the cover 11. The second electrode 1212 on the lower surface of the dielectric material
1101 covers part of the area that faces the first electrode 1211. As a result, unlike
the upper surface of the dielectric material 1101 where the first electrode 1211 is
formed, the lower surface of the dielectric material 1101 where the second electrode
1212 is formed is divided into a covered area and an uncovered area.
[0130] Furthermore, as illustrated in FIG. 14, a power signal may be applied to the first
electrode 1211, and the second electrode 1212 may be grounded. For example, a high-voltage
direct current signal or a high-frequency signal may be applied to the first electrode
1211, and the second electrode 1212 may be grounded. Therefore, the first and second
electrodes 1211 and 1212 may form a potential difference with the dielectric material
1101 there between.
[0131] Due to this, as illustrated in FIG. 15, the plasma generation unit 12 may generate
plasma with respect to the area on the lower surface of the dielectric material 1101
that is not covered with the second electrode 1212, more specifically, the corner
portion where the second electrode 1212 and the dielectric material 1101 meet each
other.
[0132] Furthermore, according to this embodiment, the cover 11 may further include a shielding
part 1102 for shielding the first electrode 1211.
[0133] Since the plasma generation unit 12, as described above, applies a high-voltage power
signal to the first electrode 1211 to generate plasma, the shielding part 1102 may
shield the first electrode 1211 to protect a user of the plasma treatment apparatus
1 from a risk of electric shock. However, the second electrode 1212 facing the body
part does not have to be separately shielded since the second electrode 1212 is grounded
and therefore there is no risk of electric shock.
[0134] FIG. 16 is a partial sectional view illustrating the plasma generation unit 12 further
including a medicine M according to an embodiment of the inventive concept.
[0135] In addition, according to an embodiment of the inventive concept, the cover 11 may
further include the medicine M applied to the one surface of the dielectric material
1101.
[0136] For example, as illustrated in FIG. 16, the medicine M may be entirely applied to
the lower surface of the dielectric material 1101 on which the second electrode 1212
is formed.
[0137] FIG. 17 is a partial sectional view illustrating the plasma generation unit 12 further
including a medicine M according to another embodiment of the inventive concept.
[0138] According to another embodiment of the inventive concept, the medicine M may be applied
to the space formed by the one surface of the dielectric material 1101 and the second
electrode 1212.
[0139] For example, as illustrated in FIG. 17, the medicine M is not entirely applied to
the lower surface of the dielectric material 1101 on which the second electrode 1212
is formed, but may fill at least part of the space surrounded by the lower surface
of the dielectric material 1101 and the side surfaces of the second electrode 1212.
[0140] FIG. 18 is a partial sectional view illustrating the plasma generation unit 12 further
including a medicine M according to yet another embodiment of the inventive concept.
[0141] According to yet another embodiment of the inventive concept, the medicine M may
be applied to a groove 1103 formed in at least part of the area on the one surface
of the dielectric material 1101 that is not covered with the second electrode 1212.
[0142] For example, as illustrated in FIG. 18, the dielectric material 1101 may further
include the groove 1103 formed in all or part of the remaining area other than the
area on the lower surface of the dielectric material 1101 that is covered with the
second electrode 1212. The groove 1103 may be filled with the medicine M.
[0143] As described above, the plasma generation unit 12 may further include the medicine
M on the one surface of the dielectric material 1101, on which the second electrode
1212 is formed, thereby further increasing treatment effects of plasma on a body part.
[0144] FIG. 19 is a view illustrating an operation of the plasma treatment apparatus 1 according
to yet another embodiment of the inventive concept.
[0145] In the embodiment in which the plasma generation unit 12 is integrated with the cover
11, the gas supply unit 13 may supply a source gas to the cover 11 through a gas supply
tube 115.
[0146] For example, the gas supply unit 13 may supply air to the cover 11 through the gas
supply tube 115. In this case, the plasma generation unit 12 generates atmospheric
plasma. In another example, the gas supply unit 13 may supply at least one of argon
and helium to the cover 11 through the gas supply tube 115. In this case, the plasma
generation unit 12 generates argon or helium plasma.
[0147] As in the other embodiments, the plasma generation unit 12 may generate plasma and
may provide the plasma to the cover 11, and ozone may be generated as by-products.
The exhaust unit 14 may take in an exhaust gas including the by-products from the
cover 11 and may discharge the exhaust gas out of the cover 11.
[0148] Although not illustrated in the drawing, the plasma treatment apparatus 1 may further
include a controller. The controller may control operations of the plasma generation
unit 12, the gas supply unit 13, and the exhaust unit 14 to enable a user to perform
treatment on a body part using the plasma treatment apparatus 1.
[0149] FIG. 20 is a flowchart illustrating a process in which the controller controls an
operation of the plasma treatment apparatus 1 according to an embodiment of the inventive
concept.
[0150] Referring to FIG. 20, the controller may control to perform process S110 of exhausting
air from the space between the cover 11 and a body part by the exhaust unit 14, process
S120 of supplying a source gas to the plasma generation unit 12 by the gas supply
unit 13, process S130 of generating plasma by the plasma generation unit 12, and process
S140 of discharging an exhaust gas from the space between the cover 11 and the body
part by the exhaust unit 14.
[0151] According to this embodiment, the exhaust unit 14 exhausts air from the space between
the cover 11 and the body part before the plasma generation unit 12 generates plasma
after the cover 11 is attached to the body part.
[0152] Due to this, a negative pressure may be applied to the space between the cover 11
and the body part, and therefore the cover 11 may be brought into close contact with
the body part. Furthermore, the negative pressure applied to the space between the
cover 11 and the body part may open hair follicles of the body part, thereby further
increasing beauty effects by plasma when the plasma treatment apparatus 1 is used
for skin care. In addition, since pressure is decreased in the space between the cover
11 and the body part, plasma firing voltage may be lowered, which may lead to an improvement
in plasma generation efficiency.
[0153] FIG. 21 is a block diagram illustrating the plasma treatment apparatus 1 according
to another embodiment of the inventive concept.
[0154] Referring to FIG. 21, the plasma treatment apparatus 1 may further include a by-product
removal unit 15, a sensor unit 16, and a controller 17.
[0155] The by-product removal unit 15 removes by-products from an exhaust gas. The sensor
unit 16 detects whether a body part is sealed by the cover 11. The controller 17 controls
the plasma generation unit 12, depending on whether the body part is sealed or not.
[0156] The by-product removal unit 15 may include a filter that removes by-products included
in the exhaust gas while allowing the exhaust gas to pass through.
[0157] According to an embodiment, the by-product removal unit 15 may include an ozone removal
filter that removes ozone from the exhaust gas. That is, a by-product removed by the
by-product removal unit 15 in this embodiment is ozone.
[0158] The ozone removal filter may have a material for absorbing ozone. For example, the
ozone removal filter may have manganese dioxide as an ozone absorbing material, but
the material included in the filter is not limited to manganese dioxide.
[0159] By-products removed from the exhaust gas by the by-product removal unit 15 are not
limited to ozone. The by-product removal unit 15 may remove various other by-products
harmful to human bodies or an environment.
[0160] The by-product removal unit 15 may filter the exhaust gas passing through the exhaust
unit 14 to remove by-products. In other words, the exhaust gas exhausted from the
cover 11 may pass through the by-product removal unit 15 past the exhaust unit 14
and may be discharged out of the plasma treatment apparatus 1.
[0161] However, according to another embodiment, the by-product removal unit 15 may be disposed
between the cover 11 and the exhaust unit 14. For example, the by-product removal
unit 15 may be installed in an exhaust tube that connects the cover 11 and the exhaust
unit 14. In another example, the by-product removal unit 15 may be installed in an
exhaust hole included in the cover 11 and may remove by-products in an exhaust gas
leaving the cover 11.
[0162] While FIG. 21 illustrates an example that the exhaust gas passing through the exhaust
unit 14 and the by-product removal unit 15 is discharged out of the plasma treatment
apparatus 1, the exhaust gas may be supplied to the plasma generation unit 12 again.
In other words, the exhaust unit 14 may supply the exhaust gas to the plasma generation
unit 12 to allow the exhaust gas to circulate in the plasma treatment apparatus 1.
[0163] In this case, the plasma treatment apparatus 1 may form a closed system. Therefore,
even though by-products are slightly included in the exhaust gas passing through the
by-product removal unit 15, a user is less likely to be exposed to the by-products
while the apparatus is in operation since the exhaust gas is not discharged to the
outside.
[0164] FIG. 22 is a front view illustrating the cover 11 in the plasma treatment apparatus
1 according to another embodiment of the inventive concept, with a boundary surface
and a body part making contact with each other. FIG. 23 is a front view illustrating
the cover 11 in the plasma treatment apparatus 1 according to another embodiment of
the inventive concept, with the boundary surface and the body part separated from
each other.
[0165] The sensor unit 16 detects whether the body part is sealed by the cover 11.
[0166] According to an embodiment, the sensor unit 16 may include at least one contact sensor
161 that is provided on the boundary surface of the cover 11 making contact with the
body part and that detects whether the boundary surface and the body part are brought
into contact with, or separated from, each other.
[0167] For example, referring to FIGS. 22 and 23, the at least one contact sensor 161 may
be provided on the boundary surface (e.g., the sealing part 111) of the cover 11 that
makes contact with the body part. When the boundary surface of the cover 11 makes
contact with the body part, the contact sensor 161 may detect the contact and may
output an electrical signal corresponding to the contact.
[0168] According to another embodiment, the sensor unit 16 may include at least one pressure
sensor provided on the boundary surface of the cover 11. The pressure sensor may detect
pressure exerted on the pressure sensor and may convert the pressure into an electrical
signal. The pressure sensor may include, for example, a strain gauge, a load cell,
or the like.
[0169] In the case where the pressure sensor is used to detect whether the body part is
sealed or not, when the pressure detected by the pressure sensor is lower than a preset
threshold value, it may be determined that the body part is not sealed, and when the
pressure is higher than or equal to the threshold value, it may be determined that
the body part is sealed.
[0170] The controller 17 controls the plasma generation unit 12, depending on whether the
body part is sealed or not.
[0171] According to an embodiment, the controller 17 may stop an operation of the plasma
generation unit 12 in the case where the body part is not sealed.
[0172] For example, in the case where the contact sensor 161 is used to detect whether the
body part is sealed or not, the controller 17, as illustrated in FIG. 23, may stop
an operation of the plasma generation unit 12 to stop the supply of plasma to the
cover 11 when the contact sensor 161 detects the separation of the boundary surface
and the body part.
[0173] In the case where a plurality of contact sensors 161 are installed on the cover 11,
the controller 117 may stop an operation of the plasma generation unit 12 when any
one of the plurality of contact sensors 161 detects the separation of the boundary
surface and the body part. In other words, when any one of the plurality of contact
sensors 161 detects the separation of the boundary surface and the body part, the
plasma generation unit 12 stops operating.
[0174] In addition, the controller 17 may restart the operation of the plasma generation
unit 12 in the case where the body part is sealed again.
[0175] For example, in the case where the contact sensor 161 detects the contact between
the boundary surface and the body part again, the controller 17, as illustrated in
FIG. 22, may restart the operation of the plasma generation unit 12 to start the supply
of plasma to the cover 11 again.
[0176] FIG. 24 is a flowchart illustrating a process in which the controller 17 controls
the plasma generation unit 12 according to another embodiment of the inventive concept.
[0177] Referring to FIG. 24, the controller 17 may control to perform process Sill of generating
plasma by the plasma generation unit 12, process S113 of stopping an operation of
the plasma generation unit 12 when a boundary surface and a body part are separated
from each other (Y in Process S112), and process S115 of restarting the operation
of the plasma generation unit 12 when the boundary surface and the body part make
contact with each other again (Y in Process S114).
[0178] As described above, the controller 17 may control the plasma generation unit 12,
depending on whether the body part is sealed or not. Accordingly, in the case where
the body part is not sealed by the cover 11 and therefore an exhaust gas is likely
to be leaked, the plasma generation unit 12 may stop operating to stop generation
of plasma and by-products generated along with the plasma.
[0179] According to another embodiment of the inventive concept, the controller 17 may control
the exhaust unit 14, depending on whether the body part is sealed or not.
[0180] According to this embodiment, the exhaust unit 14 may include a suction pump that
takes in an exhaust gas from the space between the cover 11 and the body part. The
suction pump may be a variable suction pump that is variable in suction pressure.
[0181] In the case where the body part is not sealed, the controller 17 may raise the suction
pressure of the variable suction pump. Thereafter, the controller 17 may stop an operation
of the variable suction pump after preset time passes.
[0182] For example, when the contact sensor 161 detects that the boundary surface and the
body part are separated from each other, the controller 17 may temporarily raise the
suction pressure of the variable suction pump and may stop an operation of the variable
suction pump after preset time passes.
[0183] In addition, the controller 17 may restart the operation of the variable suction
pump in the case where the body part is sealed again.
[0184] For example, in the case where the contact sensor 161 detects contact between the
boundary surface and the body part again, the controller 17 may restart the operation
of the variable suction pump.
[0185] FIG. 25 is a flowchart illustrating a process in which the controller 17 controls
the exhaust unit 14 according to another embodiment of the inventive concept.
[0186] Referring to FIG. 25, the controller 17 may control to perform process S121 of exhausting
an exhaust gas by the exhaust unit 14, process S123 of raising the suction pressure
of a variable suction pump included in the exhaust unit 14 in the case where a boundary
surface and a body part are separated from each other (Y in Process S122), process
S125 of stopping an operation of the exhaust unit 14 after preset time passes (Y in
Process S124), and process S127 of restarting the operation of the exhaust unit 14
in the case where the boundary surface and the body part make contact with each other
again (Y in Process S126).
[0187] The controller 17 may control the exhaust unit 14 and the variable suction pump included
therein, depending on whether the body part is sealed or not. As a result, in the
case where the body part is not sealed by the cover 11 and therefore the exhaust gas
is likely to be leaked, the suction pressure of the variable suction pump may be instantaneously
raised to rapidly discharge by-products present in the space between the cover 11
and the body part from the cover 11.
[0188] According to an embodiment of the inventive concept, the cover 11 may be configured
such that the area of a supply hole S through which plasma is supplied from the plasma
generation unit 12 into the cover 11 is greater than the area of an exhaust hole E
through which the exhaust gas is discharged to the exhaust unit 14.
[0189] For example, referring to FIGS. 22 and 23, the area of the supply hole S that is
formed in the cover 11 and through which plasma generated by the plasma generation
unit 12 passes may be greater than the area of the exhaust hole E that is formed in
the cover 11 and through which the exhaust gas passes. In other words, the area of
the exhaust hole E through which the exhaust gas is discharged from the cover 11 is
smaller than the area of the supply hole S through which plasma is introduced into
the cover 11.
[0190] In the case where, as illustrated in FIG. 19, the plasma generation unit 12 is integrated
with the cover 11 and plasma is generated in the space between the cover 11 and the
body part, the area of the supply hole S through which a source gas is supplied from
the gas supply unit 13 may be greater than the area of the exhaust hole E.
[0191] According to this embodiment, time during which plasma stays in the cover 11 may
be increased, and therefore the plasma may sufficiently interact with the body part,
thereby effectively performing treatment on the body part.
[0192] FIG. 26 is a front view illustrating the cover 11 in the plasma treatment apparatus
1 according to yet another embodiment of the inventive concept, with a boundary surface
and a body part making contact with each other. FIG. 27 is a front view illustrating
the cover 11 in the plasma treatment apparatus 1 according to yet another embodiment
of the inventive concept, with the boundary surface and the body part separated from
each other.
[0193] According to yet another embodiment of the inventive concept, the cover 11 may further
include an exhaust hole adjustment unit 18 that hides or opens a portion of the exhaust
hole E to adjust the area of the exhaust hole E.
[0194] For example, as illustrated in FIG. 26, the exhaust hole adjustment unit 18 may hide
a portion of the exhaust hole E when plasma is supplied into the cover 11 to perform
treatment on the body part. At this time, the exhaust hole adjustment unit 18 installed
in the exhaust hole E may hide a portion of the entire area of the exhaust hole E
such that the area of the exhaust hole E is smaller than the area of the supply hole
S as described above.
[0195] According to this embodiment, in the case where the body part is not sealed, the
controller 17 may control the exhaust hole adjustment unit 18 such that a portion
of the exhaust hole E is opened to increase the area of the exhaust hole E.
[0196] For example, in the case where the boundary surface of the cover 11 and the body
part are separated from each other and therefore the body part is not sealed, the
controller 17, as illustrated in FIG. 27, may control the exhaust hole adjustment
unit 18 to open a portion of the exhaust hole E hidden by the exhaust hole adjustment
unit 18 to increase the area of the exhaust hole E.
[0197] To adjust the area of the exhaust hole E depending on whether the body part is sealed
or not, the exhaust hole adjustment unit 18 may include a screen that is movable on
a plane where the exhaust hole E is located, like a shutter of a camera. The screen
may be operated by an actuator that operates according to a control signal of the
controller 17.
[0198] In addition, in this embodiment, in the case where the body part is sealed again,
the controller 17 may control the exhaust hole adjustment unit 18 such that a portion
of the exhaust hole E is hidden again to decrease the area of the exhaust hole E.
[0199] For example, in the case where the boundary surface of the cover 11 and the body
part make contact with each other again and therefore the body part is sealed, the
controller 17, as illustrated in FIG. 26, may operate the exhaust hole adjustment
unit 18 to hide a partial area of the exhaust hole E again to decrease the area of
the exhaust hole E.
[0200] FIG. 28 is a flowchart illustrating a process in which the controller 17 controls
the exhaust hole adjustment unit 18 according to yet another embodiment of the inventive
concept.
[0201] Referring to FIG. 28, the controller 17 may control to perform process S132 of controlling
the exhaust hole adjustment unit 18 to open a portion of the exhaust hole E to increase
the area of the exhaust hole E when a boundary surface and a body part are separated
from each other (Y in Process S131) and process S134 of controlling the exhaust hole
adjustment unit 18 to hide a portion of the exhaust hole E to decrease the area of
the exhaust hole E when the boundary surface and the body part make contact with each
other again (Y in Process S133).
[0202] The controller 17 may control the exhaust hole adjustment unit 18 to adjust the area
of the exhaust hole E, depending on whether the body part is sealed or not. As a result,
in the case where the body part is not sealed by the cover 11 and therefore an exhaust
gas is likely to be leaked, the area of the exhaust hole E may be increased to increase
the amount of exhaust gas discharged from the cover 11 by the exhaust unit 14, thereby
rapidly discharging by-products remaining in the space between the cover 11 and the
body part from the cover 11.
[0203] The above-described plasma treatment apparatus 1 relates to a closed-type plasma
treatment system that covers and seals a body part with the cover 11 such as a mask
or a pad and then treats the body part with plasma or plasma and medicine. Hereinafter,
an open-type plasma treatment system will be described that treats a body part with
plasma or plasma and medicine, with the body part not being sealed.
[0204] FIG. 29 is a side view illustrating a plasma treatment apparatus 2 according to an
embodiment of the inventive concept.
[0205] The plasma treatment apparatus 2 according to an embodiment of the inventive concept
includes a plasma generation unit 21, a gas supply unit (not illustrated), a path-providing
unit 23, and a driving unit 24.
[0206] The plasma generation unit 21 generates plasma. The gas supply unit supplies, to
the plasma generation unit 21, a source gas for generating the plasma. The path-providing
unit 23 provides a path along which the plasma generation unit 21 moves above a body
part. The driving unit 24 moves the plasma generation unit 21 along the path-providing
unit 23.
[0207] The plasma generation unit 21 may discharge the source gas with high voltage to divide
gas in a discharging space into electrons and ions. The source gas excited into a
plasma state by the plasma generation unit 21 is sprayed from a nozzle of the plasma
generation unit 21 and provided to the body part.
[0208] A face is illustrated in FIG. 29 as an example of the body part to be treated with
plasma. Without being limited thereto, however, the body part includes various body
parts.
[0209] FIG. 30 is a sectional view illustrating the plasma generation unit 21 according
to an embodiment of the inventive concept.
[0210] According to an embodiment of the inventive concept, the plasma generation unit 21
may include a first electrode 211 having an empty space through which the source gas
passes, a dielectric material 213 surrounding the first electrode 211, and a second
electrode 212 surrounding at least part of the dielectric material 213.
[0211] For example, as illustrated in FIG. 30, the first and second electrodes 211 and 212
may face each other with the dielectric material 213 therebetween. Here, the second
electrode 212 on the outside of the plasma generation unit 21 may be disposed to surround
a partial area of the first electrode 211 inside the plasma generation unit 21.
[0212] That is, the first electrode 211 and the second electrode 212 have hollow cylindrical
shapes with different diameters and lengths and are disposed to overlap each other
with the dielectric material 213 therebetween. However, the area of the first electrode
211 that overlaps the second electrode 212 is a partial area of the first electrode
211.
[0213] Furthermore, the plasma treatment apparatus 2 further includes a power supply that
supplies power for generating plasma to the plasma generation unit 21.
[0214] Referring to FIG. 30, the power supply may apply a power signal to the first electrode
211 and may ground the second electrode 212. The power supply may apply a high-voltage
direct current signal or a high-frequency signal as the power signal.
[0215] According to an embodiment of the inventive concept, the gas supply unit may supply
an inert gas to the plasma generation unit 21 as the source gas. For example, the
gas supply unit may supply at least one of argon and helium. In the case where the
inert gas such as argon or helium is supplied as the source gas, ozone harmful to
a human body may be minimized when plasma is generated.
[0216] Referring again to FIG. 29, the path-providing unit 23 provides a path along which
the plasma generation unit 21 moves above the body part to be treated.
[0217] Although not illustrated in FIG. 29, the path-providing unit 23 may include a rail
that supports a wheel included in the plasma generation unit 21. In this case, the
wheel included in the plasma generation unit 21 may rotates on the rail, and therefore
the plasma generation unit 21 may move along the rail.
[0218] FIGS. 31 and 32 are plan views illustrating the plasma treatment apparatus 2 including
the path-providing unit 23 according to an embodiment of the inventive concept.
[0219] According to an embodiment of the inventive concept, the path-providing unit 23 may
provide a linear path that linearly extends above the body part.
[0220] For example, as illustrated in FIG. 31, the path-providing unit 23 may include a
linear rail that extends in a straight line. In the case where the body part to be
treated with plasma is too wide like a face to be treated with one rail, the path-providing
unit 23 may include two or more rails to increase the area to which plasma is provided
by the plasma generation unit 21.
[0221] In another example, as illustrated in FIG. 32, the path-providing unit 23 may include
a curved rail that extends in a curve. In other words, the path provided by the path-providing
unit 23 includes a curved path as well as a linear path.
[0222] In the case where the path-providing unit 23 provides a curved path above the body
part, the curvature or length of the path may be determined and manufactured in advance
to be appropriate for the body part to be treated with plasma.
[0223] FIG. 33 is a plan view illustrating the plasma treatment apparatus 2 including the
path-providing unit 23 according to another embodiment of the inventive concept.
[0224] According to another embodiment of the inventive concept, the path-providing unit
23 may provide a loop path that extends in a loop shape above the body part.
[0225] For example, referring to FIG. 33, the path-providing unit 23 may include a loop
rail with a loop shape. That is, unlike the above-described path-providing unit 23
including the linear rail, the path-providing unit 23 in this embodiment includes
a closed loop rail. Likewise to the linear rail, the loop rail may also have a shape
or size determined in advance to be appropriate for the body part to be treated with
plasma.
[0226] FIG. 33 illustrates an example that two plasma generation units 21 provide plasma
to a face while moving along the loop rail disposed above the face. Without being
limited thereto, however, the number of plasma generation units 21 moving along the
loop rail may be one or three or more according to embodiments.
[0227] FIG. 34 is a plan view illustrating the plasma treatment apparatus 2 including the
path-providing unit 23 according to yet another embodiment of the inventive concept.
[0228] According to yet another embodiment of the inventive concept, the path-providing
unit 23 may provide an intensive care area path in which a first partial path, a turning
path, and a second partial path are successively connected.
[0229] For example, referring to FIG. 34, the path-providing unit 23 may provide, above
one or more predetermined intensive care areas A
1, A
2, and A
3 of the body part, an intensive care area path in which a first partial path 2311
extending in a first direction Di, a turning path 2310 that turns in a second direction
D
2 opposite to the first direction D
1, and a second partial path 2312 extending in the second direction D
2 are successively connected.
[0230] In this embodiment, the intensive care areas A
1, A
2, and A
3 may be parts to which plasma is intensively provided for treatment, and may correspond
to affected parts where acne, an atopic skin disease, a wound, and the like are located.
The body part to be treated with plasma in FIG. 34 is a face, and the intensive care
areas A
1, A
2, and A
3 are the forehead and the cheeks. However, the sizes and number of the intensive care
areas A
1, A
2, and A
3 may be determined in advance based on the location of the body part to be treated
with plasma, or the location and size of an affected part in the body part.
[0231] As described above, the path-providing unit 23 may provide, above an affected part
that has to be intensively treated, the intensive care area path in which the first
partial path 2311, the turning path 2310, and the second partial path 2312 are successively
connected, thereby enabling the plasma generation unit 21 to intensively provide plasma
to a local part of a body for a long time.
[0232] FIG. 35 is a plan view illustrating the plasma treatment apparatus 2 including the
path-providing unit 23 according to yet another embodiment of the inventive concept.
[0233] According to yet another embodiment of the inventive concept, the path-providing
unit 23 may provide closed loop paths 231, 232, and 233 to a plurality of predetermined
intensive care areas A
1, A
2, and A
3 of the body part, respectively. That is, the path-providing unit 23 in this embodiment
provides, above the intensive care areas A
1, A
2, and A
3, the loop paths 231, 232, and 233 instead of a crooked intensive care area path.
[0234] The sizes and shapes of the loop paths 231, 232, and 233 may be determined in advance
based on the sizes and shapes of the intensive care areas A
1, A
2, and A
3 that have to be intensively treated.
[0235] The plasma generation unit 21 may be provided on the loop paths 231, 232, and 233
to consistently provide plasma to a local part of a body while circulating the intensive
care areas A
1, A
2, and A
3 along the paths.
[0236] FIG. 36 is a sectional view illustrating the path-providing unit 23 and the driving
unit 24 according to an embodiment of the inventive concept, and FIG. 37 is a side
view illustrating the path-providing unit 23 and a wheel 241 according to an embodiment
of the inventive concept, when viewed in the direction A of FIG. 36.
[0237] As described above, the driving unit 24 moves the plasma generation unit 21 along
the path-providing unit 23.
[0238] According to an embodiment, the driving unit 24 may include the wheel 241 and a motor
242. The wheel 241 is included in the plasma generation unit 21 and supported by the
path-providing unit 23. The motor 242 is included in the plasma generation unit 21
to rotate the wheel 241.
[0239] Referring to FIG. 36, the plasma generation unit 21 may include the motor 242, and
the wheel 241 may be coupled to a rotary shaft 243 extending from the motor 242. The
wheel 241 may be coupled to the inside of the rail of the path-providing unit 23 and
may be supported by at least one surface of the rail.
[0240] According to this embodiment, as the motor 242 operates, the wheel 241 coupled to
the rotary shaft 243 rotates, and as the wheel 241 rotates as illustrated in FIG.
37, the plasma generation unit 21 moves along the rail together with the wheel 241.
[0241] In this embodiment, the driving unit 24 moves the plasma generation unit 21 along
the path-providing unit 23 by using the wheel 241 and the motor 242. However, the
technical idea that the driving unit 24 employs to move the plasma generation unit
21 is not limited thereto. The driving unit 24 may move the plasma generation unit
21 along the path-providing unit 23 through various types of means.
[0242] FIG. 38 is a side view illustrating the plasma treatment apparatus 2 according to
another embodiment of the inventive concept, and FIG. 39 is a plan view illustrating
the plasma treatment apparatus 2 according to another embodiment of the inventive
concept.
[0243] According to another embodiment of the inventive concept, the plasma treatment apparatus
2 may further include a medicine spray unit 25. The medicine spray unit 25 sprays
a medicine while moving along the path-providing unit 23.
[0244] For example, as illustrated in FIGS. 38 and 39, the medicine spray unit 25 following
the plasma generation unit 21 may spray the medicine to a body part after the plasma
generation unit 21 provides plasma to the body part.
[0245] Since the medicine spray unit 25 sprays the medicine after the plasma generation
unit 21 provides the plasma to the body part, treatments using the plasma and the
medicine may be performed together.
[0246] In the case where the path-providing unit 23 provides a linear path above the body
part as illustrated in FIG. 38, movement of the plasma generation unit 21 and the
medicine spray unit 25 may be limited, and operation control (stopping, turning, or
the like) thereof may be complicated. However, in the case where the path-providing
unit 23 provides a closed loop path as illustrated in FIG. 39, the plasma generation
unit 21 and the medicine spray unit 25 may consistently supply the plasma and the
medicine to the body part without separate control as long as the plasma generation
unit 21 and the medicine spray unit 25 move at the same speed so as not to collide
with each other.
[0247] FIG. 40 is a side view illustrating the plasma treatment apparatus 2 according to
yet another embodiment of the inventive concept, and FIG. 41 is a plan view illustrating
the plasma treatment apparatus 2 according to yet another embodiment of the inventive
concept.
[0248] According to yet another embodiment of the inventive concept, the plasma treatment
apparatus 2 may further include a heater 26. The heater 26 radiates heat while moving
along the path-providing unit 23.
[0249] For example, as illustrated in FIGS. 40 and 41, the heater 26 ahead of the plasma
generation unit 21 may transfer heat to a body part before the plasma generation unit
21 provides plasma to the body part.
[0250] As a result, the temperature of skin may be raised by heating before plasma and a
medicine are provided to the body part, and therefore the action of the plasma on
the body part and the absorption of the medicine may be promoted, thereby improving
treatment effects.
[0251] Likewise to the plasma generation unit 21, the medicine spray unit 25 and the heater
26 also move along the path-providing unit 23. Accordingly, a component similar to
the driving unit 24 described above may be applied to the medicine spray unit 25 and
the heater 26 to move the medicine spray unit 25 and the heater 26 along the rail.
[0252] FIG. 42 is a side view illustrating the plasma treatment apparatus 2 according to
yet another embodiment of the inventive concept.
[0253] According to yet another embodiment of the inventive concept, the plasma treatment
apparatus 2 may further include a medicine mixing unit 27. The medicine mixing unit
27 having a medicine received therein is fastened to the plasma generation unit 21
to mix the medicine with plasma.
[0254] For example, as illustrated in FIG. 45, the medicine mixing unit 27 may be fastened
to a nozzle through which plasma is discharged from the plasma generation unit 21.
Since the medicine mixing unit 27 has the medicine received therein and is fastened
to the plasma generation unit 21, the plasma generation unit 21 may provide, to a
body part, plasma mixed with the medicine through the medicine mixing unit 27.
[0255] Hereinafter, embodiments of the medicine mixing unit 27 will be described in detail
with reference to drawings.
[0256] FIGS. 43 and 44 are a perspective view and a sectional view illustrating the medicine
mixing unit 27 according to an embodiment of the inventive concept.
[0257] The medicine mixing unit 27 according to an embodiment of the inventive concept is
a member attached to the plasma generation unit 21 to further enhance unique actions
of plasma. The medicine mixing unit 27 has a medicine M for enhancing actions of plasma
and provides plasma mixed with the medicine M.
[0258] Referring to FIGS. 43 and 44, the medicine mixing unit 27 includes a fastening part
271 coupled to the plasma generation unit 21, a medicine receiving part 272 that receives
the medicine M for enhancing actions of plasma, and a discharging part 273 that discharges
plasma including the medicine M.
[0259] The fastening part 271 may be fastened to the nozzle through which plasma is discharged
from the plasma generation unit 21. Since the fastening part 271 is fastened to an
end portion of the nozzle of the plasma generation unit 21, plasma generated by the
plasma generation unit 21 is discharged to the outside along with the medicine M past
the medicine mixing unit 27.
[0260] FIGS. 45 and 46 are a sectional view and a side view illustrating the medicine mixing
unit 27 according to an embodiment of the inventive concept.
[0261] According to an embodiment of the inventive concept, the fastening part 271 may be
screw-coupled to the nozzle of the plasma generation unit 21. As illustrated in FIG.
45, for the screw-coupling of the fastening part 271 and the nozzle of the plasma
generation unit 21, the nozzle and the fastening part 271 have threads engaged with
each other.
[0262] In addition, according to this embodiment, the fastening part 271 may be coupled
to a thread formed on the nozzle, the pitch of which is formed in a direction parallel
to a nozzle axis X. In other words, as illustrated in FIG. 45, the pitch of the thread
formed on the nozzle may extend in the direction of the nozzle axis X.
[0263] Due to the above-described structure, a user, as illustrated in FIG. 46, may rotate
the medicine mixing unit 27 about the nozzle axis X to adjust the degree to which
the medicine mixing unit 27 protrudes. According to this embodiment, in the case where
the length of a plasma jet discharged from the discharging part 273 of the medicine
mixing unit 27 is restricted and the distance between a target part (e.g., a body
part) to which plasma is applied and the medicine mixing unit 27 is not constant,
the user may adjust the degree to which the medicine mixing unit 27 protrudes toward
the target part, thereby effectively applying plasma to the target part.
[0264] The medicine receiving part 272 receives the medicine M for enhancing actions of
plasma.
[0265] For example, as illustrated in FIGS. 43 to 45, the medicine M may be applied to the
inner surface of the medicine mixing unit 272, and plasma passing through the medicine
receiving part 272 may be mixed with the medicine M.
[0266] FIGS. 47 to 49 are sectional views illustrating the medicine receiving part 272 and
the medicine M received therein according to embodiments of the inventive concept.
[0267] According to an embodiment of the inventive concept, the medicine receiving part
272 may be formed inside the medicine mixing unit 27 and may receive the medicine
M in a space R formed on a transfer path P for transferring plasma from the plasma
generation unit 21 to the discharging part 273.
[0268] That is, the medicine mixing unit 27 in this embodiment may be configured to ensure
the space R with a predetermined size on the transfer path P through which plasma
passes, and the medicine M may be received in the space R.
[0269] According to an embodiment, as illustrated in FIG. 47, the space R and the transfer
path P may be distinguished from each other with a partition wall 221 therebetween.
In this case, the medicine M may be received between the partition wall 221 and an
inner wall of the medicine receiving part 272.
[0270] According to another embodiment of the inventive concept, the medicine receiving
part 272 may be formed inside the medicine mixing unit 27 and may receive the medicine
M on the transfer path P for transferring plasma from the plasma generation unit 21
to the discharging part 273.
[0271] For example, referring to FIG. 48, the medicine mixing unit 27 may have a tapered
shape that becomes gradually narrower toward one end, and the medicine M may be applied
to the surface of the transfer path P formed in the medicine mixing unit 27.
[0272] Furthermore, according to yet another embodiment of the inventive concept, the medicine
receiving part 272 may receive the medicine M in both the transfer path P and the
space R formed on the transfer path.
[0273] For example, referring to FIG. 49, the medicine mixing unit 27 may be configured
to have both the transfer path P and the space R, and the medicine M may fill the
space R and may be coated on the transfer path P.
[0274] According to an embodiment of the inventive concept, the medicine receiving part
272 may receive hydrogen peroxide as the medicine M. In the case where hydrogen peroxide
with a predetermined concentration is used as the medicine M, germicidal action of
plasma may be significantly enhanced than in the case where only plasma is used. However,
the medicine M is not limited to hydrogen peroxide, and various materials may be used
as the medicine M, depending on a treatment purpose or a part to be treated.
[0275] According to an embodiment, the transfer path P may include a straight tube that
extends from the nozzle in a straight line. For example, the transfer path P in FIGS.
47 and 49 is a straight tube with a constant diameter, and the transfer path P in
FIG. 48 is a straight tube with a variable diameter in the lengthwise direction.
[0276] However, according to an embodiment, the transfer path P may include a curved tube
or a bent tube other than the straight tube.
[0277] FIG. 50 is a schematic view illustrating the transfer path P according to various
embodiments of the inventive concept.
[0278] In FIG. 50, the transfer path P formed in the medicine mixing unit 27 is represented
simply by a solid line, without regard for the thickness of the transfer path P.
[0279] As described above, the transfer path P may extend in a straight line from the nozzle
of the plasma generation unit 21 to the discharging part 273 of the medicine mixing
unit 27 (see a straight tube of FIG. 50).
[0280] However, according to another embodiment, the transfer path P may extend in a curve
shape from the nozzle to the discharging part 273 (see curved tubes 1 and 2 of FIG.
50).
[0281] In this case, the curved tube may extend in a curve shape on a virtual plane where
the nozzle and the discharging part 273 are located. That is, likewise to curved tube
1 of FIG. 50, the curved tube may be curved on a single plane.
[0282] In another case, the curved tube may be formed to be wound around a virtual line
that connects the nozzle and the discharging part 273. That is, likewise to curved
tube 2 of FIG. 50, the curved tube may not be located on a single plane and may be
formed to be wound around an axis X that connects the nozzle and the discharging part
273.
[0283] In addition, according to yet another embodiment, the transfer path P may extend
in a broken line shape from the nozzle to the discharging part 273 (see bent tubes
1 and 2 of FIG. 50).
[0284] In this case, the bent tube may extend in a broken line shape on a virtual plane
where the nozzle and the discharging part 273 are located. That is, likewise to bent
tube 1 of FIG. 50, the bent tube may be bent on a single plane.
[0285] In another case, the bent tube may be formed to be wound around a virtual line that
connects the nozzle and the discharging part 273. That is, likewise to bent tube 2
of FIG. 50, the bent tube may not be located on a single plane and may be formed to
be wound in a broken line shape around the axis X that connects the nozzle and the
discharging part 273.
[0286] Since the curved tube and the bent tube are curved or bent in a direction different
from the direction of the axis X that connects the nozzle and the discharging part
273, the curved tube and the bent tube have a longer plasma path than the straight
tube. Accordingly, plasma may be mixed with a larger amount of medicine M on the transfer
path P, and thus the degree of action of the plasma may be further increased.
[0287] FIG. 51 is a sectional view illustrating the transfer path P and a cavity C formed
therein according to yet another embodiment of the inventive concept.
[0288] According to yet another embodiment of the inventive concept, the medicine receiving
part 272 may further include, in a portion corresponding to a vertex of a bent tube,
the cavity C for receiving a medicine M.
[0289] For example, as illustrated in FIG. 51, the bent tube extending in a broken line
shape may include the cavity C at the vertex where a straight tube and a straight
tube meet. The cavity C may be formed to have a predetermined volume and shape and
may receive the medicine M therein. For example, the cavity C may be filled with the
medicine M. Without being limited thereto, however, the medicine M may be coated on
the inner surface of the cavity C.
[0290] According to this embodiment, plasma flowing along the transfer path P may enter
the cavity C at the vertex of the bent tube and may form vortex in the cavity C. Accordingly,
the plasma may be mixed with a larger amount of medicine M in the cavity C, and thus
the degree of action of the plasma may be further increased.
[0291] The plasma treatment apparatus 2 described above may treat a body part, such as skin
or a wound, using plasma or plasma and a medicine, thereby effectively removing harmful
germs in an affected part and promoting regeneration of tissues.
[0292] While the inventive concept has been described with reference to exemplary embodiments,
it will be apparent to those skilled in the art that various changes and modifications
may be made without departing from the spirit and scope of the inventive concept.
Therefore, it should be understood that the above embodiments are not limiting, but
illustrative.
1. A plasma treatment apparatus comprising:
a cover attached to a body part;
a plasma generation unit configured to generate plasma and provide the plasma to the
cover;
a gas supply unit configured to supply a source gas for generating the plasma to the
plasma generation unit; and
an exhaust unit configured to exhaust an exhaust gas from the cover.
2. The plasma treatment apparatus of claim 1, wherein the cover includes a mask manufactured
in advance to cover a face.
3. The plasma treatment apparatus of claim 1, wherein the cover includes a pad manufactured
in advance to cover a wound.
4. The plasma treatment apparatus of claim 1, wherein the cover includes, at an edge,
a sealing part brought into close contact with the body part to seal a space between
the cover and the body part.
5. The plasma treatment apparatus of claim 4, wherein the cover further includes, on
a portion facing the body part, a spacing part configured to maintain spacing between
the cover and the body part.
6. The plasma treatment apparatus of claim 1, wherein the plasma generation unit is separated
from the cover and provides the plasma to the cover through a tube that connects the
plasma generation unit and the cover.
7. The plasma treatment apparatus of claim 1, wherein the plasma generation unit is installed
on the cover and provides the plasma into a space between the cover and the body part.
8. The plasma treatment apparatus of claim 7, wherein the plasma generation unit includes
opposite electrodes disposed to face each other.
9. The plasma treatment apparatus of claim 8, wherein the gas supply unit includes a
fan unit configured to generate an air flow from a space between the opposite electrodes
to the space between the cover and the body part.
10. The plasma treatment apparatus of claim 8, wherein the plasma generation unit further
includes an ozone absorption unit configured to absorb ozone between the opposite
electrodes and the space between the cover and the body part.
11. The plasma treatment apparatus of claim 10, wherein the ozone absorption unit includes
a filter with manganese dioxide.
12. The plasma treatment apparatus of claim 8, wherein the plasma generation unit further
includes a medicine supply unit configured to supply a medicine between the opposite
electrodes and the space between the cover and the body part.
13. The plasma treatment apparatus of claim 12, wherein the medicine supply unit includes
a medicine plate with one surface facing the body part and an opposite surface to
which the medicine is applied, the medicine plate having a hole through which the
plasma mixed with the medicine is sent into the space between the cover and the body
part.
14. The plasma treatment apparatus of claim 1, wherein a medicine is applied to at least
part of one surface of the cover that faces the body part.
15. The plasma treatment apparatus of claim 1, wherein the plasma generation unit is integrated
with the cover and generates the plasma in a space between the cover and the body
part.
16. The plasma treatment apparatus of claim 15, wherein the plasma generation unit includes:
a first electrode formed on an opposite surface of a dielectric material constituting
the cover, the opposite surface being opposite to one surface of the dielectric material
that faces the body part; and
a second electrode formed on the one surface of the dielectric material.
17. The plasma treatment apparatus of claim 16, wherein the first electrode covers at
least a partial area on the opposite surface of the dielectric material, and
wherein the second electrode on the one surface of the dielectric material covers
part of an area that faces the first electrode.
18. The plasma treatment apparatus of claim 16, wherein a power signal is applied to the
first electrode, and
wherein the second electrode is grounded.
19. The plasma treatment apparatus of claim 18, wherein the cover further includes a shielding
part configured to shield the first electrode.
20. The plasma treatment apparatus of claim 17, wherein the cover further includes a medicine
applied to the one surface of the dielectric material.
21. The plasma treatment apparatus of claim 20, wherein the medicine is applied to at
least part of a space formed by the one surface of the dielectric material and the
second electrode.
22. The plasma treatment apparatus of claim 20, wherein the medicine is applied to a groove
formed in at least part of an area on the one surface of the dielectric material that
is not covered with the second electrode.
23. The plasma treatment apparatus of claim 16, wherein the gas supply unit supplies the
source gas to the cover through a gas supply tube.
24. The plasma treatment apparatus of claim 1, wherein the gas supply unit supplies air
or an inert gas to the plasma generation unit.
25. The plasma treatment apparatus of claim 1, wherein the exhaust unit exhausts air from
a space between the cover and the body part before the plasma generation unit generates
the plasma after the cover is attached to the body part.
26. The plasma treatment apparatus of claim 1, further comprising:
a by-product removal unit configured to remove a by-product from the exhaust gas;
a sensor unit configured to detect whether the body part is sealed by the cover; and
a controller configured to control the plasma generation unit, depending on whether
the body part is sealed or not.
27. The plasma treatment apparatus of claim 26, wherein the sensor unit includes at least
one contact sensor provided on a boundary surface of the cover that makes contact
with the body part and configured to detect whether the boundary surface and the body
part are brought into contact with, or separated from, each other.
28. The plasma treatment apparatus of claim 27, wherein the controller stops an operation
of the plasma generation unit when the boundary surface and the body part are separated
from each other.
29. The plasma treatment apparatus of claim 28, wherein the controller stops the operation
of the plasma generation unit when any one of a plurality of contact sensors detects
that the boundary surface and the body part are separated from each other.
30. The plasma treatment apparatus of claim 28, wherein the controller restarts the operation
of the plasma generation unit when the boundary surface and the body part are brought
into contact with each other again.
31. The plasma treatment apparatus of claim 27, wherein the exhaust unit includes a variable
suction pump configured to take in the exhaust gas from a space between the cover
part and the body part, the variable suction pump being variable in suction pressure.
32. The plasma treatment apparatus of claim 31, wherein when the boundary surface and
the body part are separated from each other, the controller raises the suction pressure
of the variable suction pump and stops an operation of the variable suction pump after
preset time passes.
33. The plasma treatment apparatus of claim 32, wherein the controller restarts the operation
of the variable suction pump when the boundary surface and the body part are brought
into contact with each other again.
34. The plasma treatment apparatus of claim 27, wherein the cover is configured such that
a supply hole through which the cover receives the plasma from the plasma generation
unit or receives air from the gas supply unit has a larger area than an exhaust hole
through which the exhaust gas is discharged to the exhaust unit.
35. The plasma treatment apparatus of claim 34, wherein the cover further includes an
exhaust hole adjustment unit configured to hide or open part of the exhaust hole to
adjust the area of the exhaust hole.
36. The plasma treatment apparatus of claim 35, wherein when the boundary surface and
the body part are separated from each other, the controller controls the exhaust hole
adjustment unit to open part of the exhaust hole to increase the area of the exhaust
hole.
37. The plasma treatment apparatus of claim 36, wherein when the boundary surface and
the body part are brought into contact with each other again, the controller controls
the exhaust hole adjustment unit to hide part of the exhaust hole to decrease the
area of the exhaust hole.