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(11)

EP 3 526 369 A1

(12)

(43) Date of publication: 21.08.2019 Bulletin 2019/34 (21) Application number: 17862179.3 (22) Date of filing: 16.10.2017

(51) International Patent Classification (IPC):  C23C 24/08(2006.01) B05B 7/14(2006.01) B05B 7/22(2006.01) (86) International application number: PCT/US2017/056766 (87) International publication number: WO 2018/075395 (26.04.2018 Gazette 2018/17)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: MA MD (30) Priority: 17.10.2016 US 201615295050 (71) Applicant: The Regents of The University of Michigan Ann Arbor, MI 48109-2590 (US)	(72) Inventors: MOHANTY, Pravansu S. Canton, Michigan 48188 (US) VARADARAAJAN, Vikram Novi, Michigan 48377 (US) (74) Representative: Witte, Weller & Partner Patentanwälte mbB  Postfach 10 54 62 70047 Stuttgart 70047 Stuttgart (DE)