(19)
(11) EP 3 538 686 A1

(12)

(43) Date of publication:
18.09.2019 Bulletin 2019/38

(21) Application number: 17800813.2

(22) Date of filing: 13.11.2017
(51) International Patent Classification (IPC): 
C23C 16/04(2006.01)
C23C 16/44(2006.01)
C23C 16/18(2006.01)
C23C 16/448(2006.01)
(86) International application number:
PCT/EP2017/079021
(87) International publication number:
WO 2018/087356 (17.05.2018 Gazette 2018/20)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
MA MD

(30) Priority: 14.11.2016 GB 201619280

(71) Applicant: Aurubis Belgium SA/NV
1000 Brussels (BE)

(72) Inventors:
  • WOLANICKA, Lidia
    Cambridge Cambridgeshire CB22 3JH (GB)
  • BURDA, Marek
    Cambridge Cambridgeshire CB22 3JH (GB)
  • KOZIOL, Krzysztof Kazimierz
    Cambridge Cambridgeshire CB22 3JH (GB)

(74) Representative: Pitchford, James Edward 
Mathys & Squire LLP The Shard 32 London Bridge Street
London SE1 9SG
London SE1 9SG (GB)

   


(54) METHODS AND APPARATUS FOR MOCVD