(19)
(11) EP 3 540 393 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
18.12.2019 Bulletin 2019/51

(43) Date of publication A2:
18.09.2019 Bulletin 2019/38

(21) Application number: 19159083.5

(22) Date of filing: 25.02.2019
(51) International Patent Classification (IPC): 
G01J 3/26(2006.01)
G01J 3/28(2006.01)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 26.02.2018 JP 2018032152

(71) Applicant: Seiko Epson Corporation
Tokyo 160-8801 (JP)

(72) Inventor:
  • Hirokubo, Nozomu
    Nagano, 392-8502 (JP)

(74) Representative: Hoffmann Eitle 
Patent- und Rechtsanwälte PartmbB Arabellastraße 30
81925 München
81925 München (DE)

   


(54) SPECTROSCOPIC APPARATUS, TEMPERATURE CHARACTERISTIC DERIVATION APPARATUS, SPECTROSCOPIC SYSTEM, SPECTROSCOPY METHOD, AND TEMPERATURE CHARACTERISTIC DERIVATION METHOD


(57) A spectroscopic apparatus includes: a spectroscopic module; a temperature detection unit that detects a temperature of the spectroscopic module; and a module control unit that controls the spectroscopic module, in which the spectroscopic module includes an interference filter that has a pair of reflection films, and a gap changing unit which changes a dimension of a gap between the pair of reflection films by application of a voltage, and a capacity detection circuit that outputs a detection signal in accordance with an electrostatic capacity between the pair of reflection films, and in which the module control unit corrects a target value of the detection signal that is output from the capacity detection circuit, based on a temperature characteristic of the spectroscopic module and a detection temperature that is detected by the temperature detection unit, and controls the voltage that is to be applied to the gap changing unit, in such a manner that the detection signal that is output from the capacity detection circuit is the corrected target value.







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