(19)
(11) EP 3 550 599 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
17.08.2022 Bulletin 2022/33

(45) Mention of the grant of the patent:
13.07.2022 Bulletin 2022/28

(21) Application number: 17875533.6

(22) Date of filing: 14.11.2017
(51) International Patent Classification (IPC): 
H01L 21/683(2006.01)
H01L 21/67(2006.01)
 H01L 21/02(2006.01)
H01L 21/68(2006.01)
(52) Cooperative Patent Classification (CPC):
H01L 21/02; H01L 21/6838; H01L 21/68; H01L 21/67092
(86) International application number:
PCT/JP2017/040883
(87) International publication number:
WO 2018/101024 (07.06.2018 Gazette 2018/23)

(54)

BONDER

BONDER

DISPOSITIF DE LIAISON

(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 30.11.2016 JP 2016232353

(43) Date of publication of application:
09.10.2019 Bulletin 2019/41

(73) Proprietor: Tazmo Co., Ltd.
Kita-ku, Okayama 701-1221 (JP)

(72) Inventor:
  • TANABE Masaaki
    Ibara-shi Okayama 715-8603 (JP)

(74) Representative: Ipracraft AB 
Teknikringen 35 P. O. Box 24166
104 51 Stockholm
104 51 Stockholm (SE)


(56) References cited: : 
JP-A- 2003 165 051
JP-A- 2013 187 393
US-A1- 2006 141 742
US-A1- 2011 214 809
US-A1- 2014 318 711
 JP-A- 2006 051 556
JP-A- 2015 146 339
US-A1- 2011 005 066
US-A1- 2014 311 653
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).