(19)

(11)

EP 3 551 778 A1

(12)

(43) Date of publication: 16.10.2019 Bulletin 2019/42 (21) Application number: 17754185.1 (22) Date of filing: 12.07.2017

(51) International Patent Classification (IPC):  C23C 16/26(2006.01) B01J 19/22(2006.01) C01B 32/194(2017.01) C30B 25/02(2006.01) C23C 16/01(2006.01) C23C 16/54(2006.01) C01B 32/186(2017.01) B32B 37/00(2006.01) C30B 33/00(2006.01) C30B 29/02(2006.01) (86) International application number: PCT/FI2017/050536 (87) International publication number: WO 2018/087420 (17.05.2018 Gazette 2018/20)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: MA MD (30) Priority: 08.11.2016 US 201662418818 P (71) Applicant: Nanovate OY 02110 Espoo (FI)	(72) Inventor: PYYMAKI PERROS, Alexander Christian 02110 Espoo (FI) (74) Representative: Berggren Oy, Helsinki & Oulu  P.O. Box 16 Eteläinen Rautatiekatu 10A 00101 Helsinki 00101 Helsinki (FI)