(19)
(11) EP 3 555 343 A1

(12)

(43) Date of publication:
23.10.2019 Bulletin 2019/43

(21) Application number: 17784891.8

(22) Date of filing: 02.10.2017
(51) International Patent Classification (IPC): 
C23C 16/56(2006.01)
C23C 16/40(2006.01)
 C23C 16/455(2006.01)
(86) International application number:
PCT/EP2017/074973
(87) International publication number:
WO 2018/060521 (05.04.2018 Gazette 2018/14)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
MA MD

(30) Priority: 30.09.2016 LU 93244

(71) Applicant: Luxembourg Institute of Science and Technology (LIST)
4362 Esch-sur-Alzette (LU)

(72) Inventors:
  • ISHCHENKO, Olga
    2432 Luxembourg (LU)
  • LENOBLE, Damien
    6920 Wellin (BE)

(74) Representative: Lecomte & Partners 
76-78, rue de Merl
2146 Luxembourg
2146 Luxembourg (LU)

   


(54) COATING COMPRISING A LAYER OF TIO2 ALLOWING SNO2 ATOMIC LAYER DEPOSITION