(19)

(11)

EP 3 574 186 A1

(12)

(43) Date of publication: 04.12.2019 Bulletin 2019/49 (21) Application number: 18702791.7 (22) Date of filing: 23.01.2018

(51) International Patent Classification (IPC):  F01C 19/00(2006.01) F04C 25/02(2006.01) F01C 21/02(2006.01) F04C 27/00(2006.01) (86) International application number: PCT/GB2018/050192 (87) International publication number: WO 2018/138487 (02.08.2018 Gazette 2018/31)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: MA MD TN (30) Priority: 25.01.2017 GB 201701266 (71) Applicant: Edwards Limited Burgess Hill, Sussex RH15 9TW (GB)	(72) Inventors: HOLBROOK, Alan Ernest Kinnaird Burgess Hill Sussex RH15 9TW (GB) SCHOFIELD, Nigel Paul Burgess Hill Sussex RH15 9TW (GB) MIRZA, Ikram Murtaza Burgess Hill Sussex RH15 9TW (GB) (74) Representative: Arnold, Emily Anne  Atlas Copco Vacuum Technique Global Technology Centre Innovation Drive Burgess Hill, West Sussex RH15 9TW Burgess Hill, West Sussex RH15 9TW (GB)