(19)

(11)

EP 3 577 524 A1

(12)

(43) Date of publication: 11.12.2019 Bulletin 2019/50 (21) Application number: 18703964.9 (22) Date of filing: 05.02.2018

(51) International Patent Classification (IPC):  G03F 7/40(2006.01) (86) International application number: PCT/EP2018/052726 (87) International publication number: WO 2018/141944 (09.08.2018 Gazette 2018/32)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: MA MD TN (30) Priority: 06.02.2017 JP 2017019871 (71) Applicant: Merck Patent GmbH 64293 Darmstadt (DE)	(72) Inventors: YAMAMOTO, Kazuma Kakegawa-shi Shizuoka 437-14 (JP) NAGAHARA, Tatsuro Kakegawa-shi Shizuoka 437-14 (JP) SEKITO, Takashi Kakegawa-shi Shizuoka 437-14 (JP) YASHIMA, Tomoyasu Kakegawa-shi Shizuoka 437-14 (JP) ISHII, Maki Kakegawa-shi Shizuoka 437-14 (JP)