(19)
(11) EP 3 593 389 A1

(12)

(43) Date of publication:
15.01.2020 Bulletin 2020/03

(21) Application number: 18710933.5

(22) Date of filing: 08.03.2018
(51) International Patent Classification (IPC): 
H01L 31/0747(2012.01)
H01L 31/20(2006.01)
 H01L 31/18(2006.01)
(86) International application number:
PCT/NL2018/050140
(87) International publication number:
WO 2018/164576 (13.09.2018 Gazette 2018/37)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 09.03.2017 NL 2018491

(71) Applicant: Technische Universiteit Delft
2628 CN Delft (NL)

(72) Inventors:
  • YANG, Guangtao
    2600 AA Delft (NL)
  • ZHOU, Jia Li
    2600 AA Delft (NL)
  • ISABELLA, Olindo
    2600 AA Delft (NL)
  • ZEMAN, Miroslav
    2600 AA Delft (NL)

(74) Representative: Vogels, Leonard Johan Paul 
Octrooibureau Los en Stigter B.V. Weteringschans 96
1017 XS Amsterdam
1017 XS Amsterdam (NL)

   


(54) MASK-LESS PATTERNING OF AMORPHOUS SILICON LAYERS FOR LOW-COST SILICON HETERO-JUNCTION INTERDIGITATED BACK-CONTACT SOLAR CELLS