| (84) |
Designated Contracting States: |
|
DK GB NL NO |
| (30) |
Priority: |
07.04.2017 JP 2017076512
|
| (43) |
Date of publication of application: |
|
12.02.2020 Bulletin 2020/07 |
| (73) |
Proprietor: SHIN-ETSU CHEMICAL CO., LTD. |
|
Tokyo 1000005 (JP) |
|
| (72) |
Inventors: |
|
- FUJIWARA, Akitsugu
Annaka-shi
Gunma 379-0224 (JP)
- YAMADA, Tetsuro
Annaka-shi
Gunma 379-0224 (JP)
- HIROKAMI, Munenao
Annaka-shi
Gunma 379-0224 (JP)
|
| (74) |
Representative: Mewburn Ellis LLP |
|
Aurora Building
Counterslip Bristol BS1 6BX Bristol BS1 6BX (GB) |
| (56) |
References cited: :
JP-A- 2003 147 208 JP-A- 2006 160 983 JP-A- 2009 185 169 JP-A- 2017 203 025 JP-A- S56 501 604 JP-A- S56 501 682 US-A- 4 269 991
|
JP-A- 2005 089 560 JP-A- 2007 238 820 JP-A- 2014 108 950 JP-A- H07 503 748 JP-A- S56 501 650 JP-A- S61 108 665
|
|
| |
|
|
|
|