(19)

(11)

EP 3 612 608 A1

(12)

(43) Date of publication: 26.02.2020 Bulletin 2020/09 (21) Application number: 18788475.4 (22) Date of filing: 23.03.2018

(51) International Patent Classification (IPC):  C09G 1/02(2006.01) C09K 3/14(2006.01) C09G 1/04(2006.01) H01L 21/306(2006.01) (86) International application number: PCT/US2018/024067 (87) International publication number: WO 2018/194792 (25.10.2018 Gazette 2018/43)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 17.04.2017 US 201762486219 P (71) Applicant: Cabot Microelectronics Corporation Aurora, Illinois 60504 (US)

(72) Inventors: HAINS, Alexander W. Aurora, Illinois 60504 (US) CHANG, Juyeon Aurora, Illinois 60504 (US) LI, Tina C. Aurora, Illinois 60504 (US) LAM, Viet Aurora, Illinois 60504 (US) CUI, Ji Aurora, Illinois 60504 (US) BROSNAN, Sarah Aurora, Illinois 60504 (US) NAM, Chul Woo Aurora, Illinois 60504 (US) (74) Representative: Barker Brettell LLP  100 Hagley Road Edgbaston Birmingham B16 8QQ Birmingham B16 8QQ (GB)