(19)

(11)

EP 3 616 237 A1

(12)

(43) Date of publication: 04.03.2020 Bulletin 2020/10 (21) Application number: 18791930.3 (22) Date of filing: 06.04.2018

(51) International Patent Classification (IPC):  H01L 21/673(2006.01) H01L 21/683(2006.01) B24B 37/10(2012.01) B24B 37/34(2012.01) B24B 7/22(2006.01) H01L 21/677(2006.01) H01L 21/68(2006.01) B24B 37/27(2012.01) B24B 41/00(2006.01) (86) International application number: PCT/US2018/026590 (87) International publication number: WO 2018/200165 (01.11.2018 Gazette 2018/44)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 26.04.2017 US 201762602538 P (71) Applicant: Axus Technology, LLC Chandler, AZ 85226 (US)	(72) Inventor: TROJAN, Daniel Ray Chandler, Arizona 85226 (US) (74) Representative: f & e patent  Braunsberger Feld 29 51429 Bergisch Gladbach 51429 Bergisch Gladbach (DE)