(19)
(11) EP 3 617 757 A8

(12) CORRECTED EUROPEAN PATENT APPLICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 A1)

(48) Corrigendum issued on:
22.04.2020 Bulletin 2020/17

(43) Date of publication:
04.03.2020 Bulletin 2020/10

(21) Application number: 18190990.4

(22) Date of filing: 27.08.2018
(51) International Patent Classification (IPC): 
G02B 5/18(2006.01)
G02B 5/20(2006.01)
 G01J 3/18(2006.01)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(71) Applicant: CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement
2002 Neuchâtel (CH)

(72) Inventors:
  • Gallinet, Benjamin
    4133 Pratteln (CH)
  • Quaranta, Giorgio
    68300 Saint-Louis (FR)
  • Basset, Guillaume
    68330 Huningue (FR)

(74) Representative: P&TS SA (AG, Ltd.) 
Avenue J.-J. Rousseau 4 P.O. Box 2848
2001 Neuchâtel
2001 Neuchâtel (CH)

   


(54) OPTICAL FILTER, OPTICAL FILTER SYSTEM, SPECTROMETER AND METHOD OF FABRICATION THEREOF


(57) In accordance with embodiments of the present invention, a nano-structured optical wavelength transmission filter (1) is provided. The optical filter (1) comprises a patterned substrate (10) on which a high refractive index dielectric waveguide (20) is arranged. A low index dielectric layer (30) is arranged on the high refractive index dielectric waveguide (20), on which an array (40) of metallic nanostructures (42a-42n) is arranged. The layers of the optical filter (1) have conformal shapes defined by patterned surface (10a) of the substrate (10).
The invention relates also an optical filter system (2) comprising the optical transmission filter (1) and a detector array (3) fixed to the substrate (10). The invention relates also to spectrometer (4) comprising at least one optical transmission filter (1) and/or at least one said optical transmission filter system (2), and has a spectral resolution of lower than 30nm for incident light having a wavelength between 300nm and 790nm.
The invention relates also to a method of fabrication of an optical filter (1), an optical filter system (2) and a spectrometer (4).