(19)

(11)

EP 3 635 792 A1

(12)

(43) Date of publication: 15.04.2020 Bulletin 2020/16 (21) Application number: 18799289.6 (22) Date of filing: 10.05.2018

(51) International Patent Classification (IPC):  H01L 31/04(2014.01) H01L 31/18(2006.01) H01L 31/05(2014.01) H02S 40/36(2014.01) (86) International application number: PCT/US2018/032159 (87) International publication number: WO 2018/209147 (15.11.2018 Gazette 2018/46)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 10.05.2017 US 201762504532 P (71) Applicant: Hitachi Chemical Co., Ltd. Tokyo 100-6606 (JP)	(72) Inventors: HARDIN, Brian E. San Carlos, California 94070 (US) HELLEBUSCH, Daniel J. Oakland, California 94618 (US) PETERS, Craig H. Belmont, California 94002 (US) SUSENO, Dhea Oakland, California 94607 (US) SUSANTO, Fillary Alameda, California 95401 (US) (74) Representative: AWA Sweden AB  Junkersgatan 1 582 35 Linköping 582 35 Linköping (SE)