(19)

(11)

EP 3 642 608 A1

(12)

(43) Date of publication: 29.04.2020 Bulletin 2020/18 (21) Application number: 17914848.1 (22) Date of filing: 20.06.2017

(51) International Patent Classification (IPC):  G01N 27/66(2006.01) G01T 1/36(2006.01) G01T 1/185(2006.01) H01J 47/02(2006.01) (86) International application number: PCT/FI2017/050460 (87) International publication number: WO 2018/234610 (27.12.2018 Gazette 2018/52)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR (71) Applicant: Heikki Sipilä Oy 02270 Espoo (FI)	(72) Inventor: SIPILÄ, Heikki Johannes 02270 Espoo (FI) (74) Representative: Berggren Oy, Helsinki & Oulu  P.O. Box 16 Eteläinen Rautatiekatu 10A 00101 Helsinki 00101 Helsinki (FI)