(19)
(11) EP 3 646 420 A1

(12)

(43) Date of publication:
06.05.2020 Bulletin 2020/19

(21) Application number: 18823875.2

(22) Date of filing: 28.06.2018
(51) International Patent Classification (IPC): 
H01S 5/20(2006.01)
B82Y 20/00(2011.01)
(86) International application number:
PCT/FI2018/050517
(87) International publication number:
WO 2019/002694 (03.01.2019 Gazette 2019/01)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 30.06.2017 FI 20175636

(71) Applicant: Oulun yliopisto
90570 Oulu (FI)

(72) Inventors:
  • RYVKIN, Boris
    90570 Oulu (FI)
  • AVRUTIN, Eugene A.
    90570 Oulu (FI)
  • KOSTAMOVAARA, Juha
    90570 Oulu (FI)

(74) Representative: Kolster Oy Ab 
Salmisaarenaukio 1 P.O. Box 204
00180 Helsinki
00180 Helsinki (FI)

   


(54) METHOD OF MANUFACTURING OPTICAL SEMICONDUCTOR APPARATUS AND THE APPARATUS