THERMALLY STABLE, DRIFT RESISTANT PROBE FOR A SCANNING PROBE MICROSCOPE AND METHOD OF MANUFACTURE - Patent 3662297

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EP 3 662 297 A1

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(43)	Date of publication:
	10.06.2020 Bulletin 2020/24

(21)	Application number: 18841688.7

(22)	Date of filing: 03.08.2018

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International Patent Classification (IPC):

G01Q 60/38^(2010.01)

B82Y 35/00^(2011.01)

(86)	International application number:
	PCT/US2018/045254

(87)	International publication number:
	WO 2019/028416 (07.02.2019 Gazette 2019/06)

(84)	Designated Contracting States:
	AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
	Designated Extension States:
	BA ME
	Designated Validation States:
	KH MA MD TN

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Priority:

03.08.2017 US 201762540959 P
04.08.2017 US 201762541617 P

(71)	Applicant: Bruker Nano, Inc.
	Santa Barbara, CA 93117 (US)

(72)	Inventors:
	WONG, Jeffrey K. Simi Valley CA 93065 (US) MUKHOPADHYAY, Deepkishore Ventura CA 93004 (US)

(74)	Representative: Winter, Brandl, Fürniss, Hübner, Röss, Kaiser, Polte - Partnerschaft mbB
	Patent- und Rechtsanwaltskanzlei Alois-Steinecker-Strasse 22 85354 Freising 85354 Freising (DE)

(54)	THERMALLY STABLE, DRIFT RESISTANT PROBE FOR A SCANNING PROBE MICROSCOPE AND METHOD OF MANUFACTURE