(19)
(11) EP 3 673 506 A1

(12)

(43) Date of publication:
01.07.2020 Bulletin 2020/27

(21) Application number: 18848860.5

(22) Date of filing: 23.08.2018
(51) International Patent Classification (IPC): 
H01L 21/67(2006.01)
H01L 21/68(2006.01)
H01L 21/687(2006.01)
H01L 21/673(2006.01)
H01L 21/683(2006.01)
(86) International application number:
PCT/US2018/047823
(87) International publication number:
WO 2019/040794 (28.02.2019 Gazette 2019/09)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 25.08.2017 US 201762550559 P

(71) Applicants:
  • Component Re-Engineering Company Inc.
    Santa Clara, CA 95054 (US)
  • Parker, Michael
    Brentwood, CA 94513 (US)

(72) Inventor:
  • PARKER, Michael
    Brentwood CA 94513 (US)

(74) Representative: Boult Wade Tennant LLP 
Salisbury Square House 8 Salisbury Square
London EC4Y 8AP
London EC4Y 8AP (GB)

   


(54) SEMICONDUCTOR SUBSTRATE SUPPORT WITH MULTIPLE ELECTRODES AND METHOD FOR MAKING SAME