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(11)

EP 3 673 513 A1

(12)

(43) Date of publication: 01.07.2020 Bulletin 2020/27 (21) Application number: 17922088.4 (22) Date of filing: 25.08.2017

(51) International Patent Classification (IPC):  H01L 29/10(2006.01) H01L 21/02(2006.01) H01L 29/51(2006.01) (86) International application number: PCT/US2017/048753 (87) International publication number: WO 2019/040083 (28.02.2019 Gazette 2019/09)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: MA MD (71) Applicant: HRL Laboratories, LLC Malibu, CA 90265-4799 (US)	(72) Inventors: CHU, Rongming Newbury Park, CA 91320 (US) CAO, Yu Agoura Hills, CA 91301 (US) (74) Representative: Lusinchi, Laurent Pierre  Ladas & Parry LLP Temple Chambers 3-7 Temple Avenue London EC4Y 0DA Temple Chambers 3-7 Temple Avenue London EC4Y 0DA (GB)