(19)
(11) EP 3 679 427 A1

(12)

(43) Date of publication:
15.07.2020 Bulletin 2020/29

(21) Application number: 18769633.1

(22) Date of filing: 07.09.2018
(51) International Patent Classification (IPC): 
G03F 7/00(2006.01)
(86) International application number:
PCT/EP2018/074193
(87) International publication number:
WO 2019/048633 (14.03.2019 Gazette 2019/11)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 07.09.2017 LU 100433

(71) Applicant: Luxembourg Institute of Science and Technology (LIST)
4362 Esch-sur-Alzette (LU)

(72) Inventors:
  • SPIRITO, David
    6700 Arlon (BE)
  • LENOBLE, Damien
    6920 Wellin (BE)

(74) Representative: Lecomte & Partners 
76-78, rue de Merl
2146 Luxembourg
2146 Luxembourg (LU)

   


(54) MOULD FOR NANOIMPRINT LITHOGRAPHY