(19)
(11) EP 3 687 785 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
07.05.2025 Bulletin 2025/19

(45) Mention of the grant of the patent:
02.04.2025 Bulletin 2025/14

(21) Application number: 18862056.1

(22) Date of filing: 28.09.2018
(51) International Patent Classification (IPC): 
B32B 3/10(2006.01)
B32B 3/30(2006.01)
G03F 7/00(2006.01)
B82Y 30/00(2011.01)
B32B 3/16(2006.01)
C23C 18/06(2006.01)
H01M 6/40(2006.01)
B82Y 40/00(2011.01)
(52) Cooperative Patent Classification (CPC):
B32B 3/10; B32B 3/16; B32B 3/30; B82Y 40/00; C23C 18/06; C23C 18/1216; C23C 18/1291; C23C 18/1295; G03F 7/0002; G03F 7/0047; C23C 16/405; C23C 16/45525; C23C 16/045
(86) International application number:
PCT/US2018/053442
(87) International publication number:
WO 2019/067912 (04.04.2019 Gazette 2019/14)

(54)

PATTERNING OF COMPLEX METAL OXIDE STRUCTURES

STRUKTURIERUNG VON KOMPLEXEN METALLOXIDSTRUKTUREN

FORMATION DE MOTIFS SUR DES STRUCTURES D'OXYDE MÉTALLIQUE COMPLEXES


(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 29.09.2017 US 201762565703 P

(43) Date of publication of application:
05.08.2020 Bulletin 2020/32

(73) Proprietor: University of Massachusetts
Westborough, MA 01581 (US)

(72) Inventors:
  • WATKINS, James J.
    South Hadley, Massachusetts 01075 (US)
  • HOWELL, Irene R.
    2593ZC The Hague (NL)

(74) Representative: Murgitroyd & Company 
165-169 Scotland Street
Glasgow G5 8PL
Glasgow G5 8PL (GB)


(56) References cited: : 
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US-A1- 2014 072 720
   
  • ROHIT KOTHARI ET AL: "Direct Patterning of Robust One-Dimensional, Two-Dimensional, and Three-Dimensional Crystalline Metal Oxide Nanostructures Using Imprint Lithography and Nanoparticle Dispersion Inks", CHEMISTRY OF MATERIALS, vol. 29, no. 9, 17 April 2017 (2017-04-17), US, pages 3908 - 3918, XP055399766, ISSN: 0897-4756, DOI: 10.1021/acs.chemmater.6b05398
  • DANIEL SCHWARZ ET AL: "Validity of Lorentz Lorenz equation in porosimetry studies", THIN SOLID FILMS, vol. 519, no. 9, 16 December 2010 (2010-12-16), pages 2994 - 2997, XP028162033, ISSN: 0040-6090, [retrieved on 20101216], DOI: 10.1016/J.TSF.2010.12.053
  • KOTHARI, R ET AL.: "Direct patterning of robust one-dimensional, two-dimensional, and three-dimensional crystalline metal oxide nanostructures using imprint lithography and nanoparticle dispersion inks", CHEMISTRY OF MATERIALS, vol. 29, no. 9, 17 April 2017 (2017-04-17), pages 3908 - 3918, XP055399766
  • OTT, AW ET AL.: "AI303 thin film growth on Si (100) using binary reaction sequence chemistry", THIN SOLID FILMS, vol. 292, no. 1-2, 5 January 1997 (1997-01-05), pages 138, 141, XP005073318, DOI: doi:10.1016/S0040-6090(96)08934-1
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).