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EP 3 687 955 A1

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(43) Date of publication: 05.08.2020 Bulletin 2020/32 (21) Application number: 18773229.2 (22) Date of filing: 27.09.2018

(51) International Patent Classification (IPC):  C04B 35/12(2006.01) C04B 35/622(2006.01) C23C 16/40(2006.01) H01L 29/26(2006.01) C04B 35/45(2006.01) C03C 17/245(2006.01) C23C 16/448(2006.01) C04B 111/94(2006.01) (86) International application number: PCT/EP2018/076349 (87) International publication number: WO 2019/063732 (04.04.2019 Gazette 2019/14)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 27.09.2017 LU 100462 (71) Applicant: Luxembourg Institute of Science and Technology (LIST) 4362 Esch-sur-Alzette (LU)	(72) Inventors: LENOBLE, Damien 6920 Wellin (BE) ANTUNES AFONSO, Joao Ricardo 4362 Esch-sur-Alzette (LU) CREPELLIERE, Jonathan 4362 Esch-sur-Alzette (LU) LUNCA POPA, Petru 4362 Esch-sur-Alzette (LU) (74) Representative: Lecomte & Partners  76-78, rue de Merl 2146 Luxembourg 2146 Luxembourg (LU)