(19)
(11) EP 3 690 423 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
29.11.2023 Bulletin 2023/48

(45) Mention of the grant of the patent:
10.05.2023 Bulletin 2023/19

(21) Application number: 19207776.6

(22) Date of filing: 07.11.2019
(51) International Patent Classification (IPC): 
G01N 3/42(2006.01)
G01L 1/14(2006.01)
G01Q 20/04(2010.01)
 B81C 99/00(2010.01)
G01L 5/00(2006.01)
G01Q 60/36(2010.01)
(52) Cooperative Patent Classification (CPC):
G01N 3/42; G01N 2203/0286; G01Q 20/04; G01Q 60/366; G01L 1/148; G01L 1/26

(54)

MEMS-BASED NANOINDENTATION FORCE SENSOR WITH ELECTRO-THERMAL TIP HEATING

MEMS-BASIERTER NANOINDENTATIONSKRAFTSENSOR MIT ELEKTROTHERMISCHER SPITZENHEIZUNG

CAPTEUR DE FORCE DE NANOINDENTATION À BASE DE MEMS COMPORTANT UN CHAUFFAGE DE POINTE ÉLECTROTHERMIQUE

(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 04.02.2019 EP 19155377

(43) Date of publication of application:
05.08.2020 Bulletin 2020/32

(73) Proprietor: Femtotools AG
8107 Buchs (CH)

(72) Inventors:
  • Beyeler, Felix
    8107 Buchs (CH)
  • Muntwyler, Simon
    8107 Buchs (CH)
  • Beyeler, David
    8107 Buchs (CH)

(74) Representative: Müller Hoffmann & Partner 
Patentanwälte mbB St.-Martin-Strasse 58
81541 München
81541 München (DE)


(56) References cited: : 
US-A1- 2014 326 707
US-A1- 2015 369 839
 US-A1- 2015 033 835
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).