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(11)

EP 3 718 133 A1

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(43) Date of publication: 07.10.2020 Bulletin 2020/41 (21) Application number: 18884487.2 (22) Date of filing: 09.11.2018

(51) International Patent Classification (IPC):  H01L 21/768(2006.01) H01L 21/78(2006.01) (86) International application number: PCT/US2018/060176 (87) International publication number: WO 2019/108366 (06.06.2019 Gazette 2019/23)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 28.11.2017 US 201762591326 P 01.05.2018 US 201862665084 P 20.07.2018 US 201862701049 P 10.09.2018 US 201862729361 P (71) Applicant: Board Of Regents, The University Of Texas System Austin, TX 78701 (US)

(72) Inventors: SREENIVASAN, Sidlgata V. Austin, Texas 78701 (US) MALLAVARAPU, Akhila Austin, Texas 78701 (US) SINGHAL, Shrawan Austin, Texas 78701 (US) DUNN, Lawrence R. Austin, Texas 78701 (US) GAWLIK, Brian Austin, Texas 78701 (US) (74) Representative: Viering, Jentschura & Partner mbB Patent- und Rechtsanwälte  Am Brauhaus 8 01099 Dresden 01099 Dresden (DE)