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EP 3 718 134 A1

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(43) Date of publication: 07.10.2020 Bulletin 2020/41 (21) Application number: 18883845.2 (22) Date of filing: 30.11.2018

(51) International Patent Classification (IPC):  H01L 21/822(2006.01) (86) International application number: PCT/US2018/063328 (87) International publication number: WO 2019/108945 (06.06.2019 Gazette 2019/23)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 01.12.2017 US 201715829442 20.02.2018 US 201815899622 07.08.2018 US 201816057747 (71) Applicant: Silicon Genesis Corporation Santa Clara, California 95051 (US)

(72) Inventors: FONG, Theodore E. Pleasanton, CA 94566 (US) CURRENT, Michael I. San Jose, CA 95124 (US) (74) Representative: White, Andrew John et al Mathys & Squire LLP The Shard 32 London Bridge Street London SE1 9SG London SE1 9SG (GB)