(19)
(11) EP 3 724 510 A1

(12)

(43) Date of publication:
21.10.2020 Bulletin 2020/43

(21) Application number: 18819358.5

(22) Date of filing: 10.12.2018
(51) International Patent Classification (IPC): 
F04D 19/04(2006.01)
F04D 27/02(2006.01)
F04D 25/06(2006.01)
(86) International application number:
PCT/GB2018/053572
(87) International publication number:
WO 2019/116012 (20.06.2019 Gazette 2019/25)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 12.12.2017 GB 201720705

(71) Applicant: Edwards Limited
Burgess Hill, Sussex RH15 9TW (GB)

(72) Inventors:
  • HAYLOCK, James Alexander
    Eastbourne, Sussex BN22 9BA (GB)
  • BAILEY, Christopher Mark
    Burgess Hill, Sussex RH15 9TW (GB)
  • SCHOFIELD, Nigel Paul
    Burgess Hill, Sussex RH15 9TW (GB)

(74) Representative: Norton, Ian Andrew 
Edwards Limited Innovation Drive Burgess Hill
West Sussex RH15 9TW
West Sussex RH15 9TW (GB)

   


(54) A TURBOMOLECULAR PUMP AND METHOD AND APPARATUS FOR CONTROLLING THE PRESSURE IN A PROCESS CHAMBER