(19)
(11) EP 3 729 530 A1

(12)

(43) Date of publication:
28.10.2020 Bulletin 2020/44

(21) Application number: 18826737.1

(22) Date of filing: 21.12.2018
(51) International Patent Classification (IPC): 
H01L 41/047(2006.01)
H01L 41/083(2006.01)
 H01L 41/08(2006.01)
H01L 41/29(2013.01)
(86) International application number:
PCT/EP2018/086743
(87) International publication number:
WO 2019/122402 (27.06.2019 Gazette 2019/26)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 22.12.2017 LU 100594

(71) Applicant: Luxembourg Institute of Science and Technology (LIST)
4362 Esch-sur-Alzette (LU)

(72) Inventors:
  • SETTE, Daniele
    38000 Grenoble (FR)
  • DEFAY, Emmanuel
    4053 Esch-Sur-Alzette (LU)

(74) Representative: Lecomte & Partners 
76-78, rue de Merl
2146 Luxembourg
2146 Luxembourg (LU)

   


(54) PIEZOELECTRIC DEVICE WITH A SENSOR AND METHOD FOR MEASURING THE BEHAVIOUR OF SAID PIEZOELECTRIC DEVICE