(19)
(11) EP 3 731 256 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
26.03.2025 Bulletin 2025/13

(45) Mention of the grant of the patent:
19.02.2025 Bulletin 2025/08

(21) Application number: 20164280.8

(22) Date of filing: 19.03.2020
(51) International Patent Classification (IPC): 
H01J 37/147(2006.01)
 H01J 37/26(2006.01)
(52) Cooperative Patent Classification (CPC):
H01J 37/26; H01J 37/1471; H01J 2237/1501; H01J 2237/2826

(54)

CHARGED PARTICLE BEAM DEVICE AND CONTROL METHOD OF OPTICAL SYSTEM OF CHARGED PARTICLE BEAM DEVICE

TEILCHENSTRAHLVORRICHTUNG UND STEUERUNGSVERFAHREN FÜR EIN OPTISCHES SYSTEM EINES TEILCHENSTRAHLS

DISPOSITIF À FAISCEAU DE PARTICULES CHARGÉES ET PROCÉDÉ DE COMMANDE D'UN SYSTÈME OPTIQUE D'UN DISPOSITIF À FAISCEAU DE PARTICULES CHARGÉES

(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 25.04.2019 JP 2019084296

(43) Date of publication of application:
28.10.2020 Bulletin 2020/44

(73) Proprietor: JEOL Ltd.
Akishima, Tokyo 196-8558 (JP)

(72) Inventors:
  • YAMAZAKI, Kazuya
    Akishima, Tokyo 196-8558 (JP)
  • SHIMIZU, Yuko
    Akishima, Tokyo 196-8558 (JP)
  • IIJIMA, Hirofumi
    Akishima, Tokyo 196-8558 (JP)
  • FUKUMURA, Takuma
    Akishima, Tokyo 196-8558 (JP)
  • HOSOGI, Naoki
    Akishima, Tokyo 196-8558 (JP)
  • NAKAMICHI, Tomohiro
    Akishima, Tokyo 196-8558 (JP)

(74) Representative: Boult Wade Tennant LLP 
Salisbury Square House 8 Salisbury Square
London EC4Y 8AP
London EC4Y 8AP (GB)


(56) References cited: : 
EP-A2- 1 263 018
US-A- 5 831 265
US-A1- 2019 115 185
 EP-A2- 2 672 503
US-A1- 2016 093 466
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).