ATBECHDEDKESFRGBGRITLILUNLSEMCPTIESILTLVFIROMKCYALTRBGCZEEHUPLSK..HRIS..MTNORS..SM..................J0009290-CORR013731256CORRECTED EUROPEAN PATENT SPECIFICATIONB8B120250326W173deBibliographieenBibliographyfrBibliographieEP20164280.8202003192021030320240419enenen201908429620190425JP2025032620251320201028202044202502192025082024092520250326202513H01J 37/147 20060101AFI20200921BHEP H01J 37/26 20060101ALI20200921BHEP H01J 37/26 20130101 FI20200902BHEP H01J 37/1471 20130101 LI20200902BHEP H01J2237/1501 20130101 LA20200902BHEP H01J2237/2826 20130101 LA20200902BHEP deTEILCHENSTRAHLVORRICHTUNG UND STEUERUNGSVERFAHREN FÜR EIN OPTISCHES SYSTEM EINES TEILCHENSTRAHLSenCHARGED PARTICLE BEAM DEVICE AND CONTROL METHOD OF OPTICAL SYSTEM OF CHARGED PARTICLE BEAM DEVICEfrDISPOSITIF À FAISCEAU DE PARTICULES CHARGÉES ET PROCÉDÉ DE COMMANDE D'UN SYSTÈME OPTIQUE D'UN DISPOSITIF À FAISCEAU DE PARTICULES CHARGÉESEP-A2- 1 263 018EP-A2- 2 672 503US-A- 5 831 265US-A1- 2016 093 466US-A1- 2019 115 185YAMAZAKI, Kazuyac/o JEOL Ltd. 3-1-2 MusashinoAkishima, Tokyo 196-8558JPSHIMIZU, Yukoc/o JEOL Ltd. 3-1-2 MusashinoAkishima, Tokyo 196-8558JPIIJIMA, Hirofumic/o JEOL Ltd. 3-1-2 MusashinoAkishima, Tokyo 196-8558JPFUKUMURA, Takumac/o JEOL Ltd. 3-1-2 MusashinoAkishima, Tokyo 196-8558JPHOSOGI, Naokic/o JEOL Ltd. 3-1-2 MusashinoAkishima, Tokyo 196-8558JPNAKAMICHI, Tomohiroc/o JEOL Ltd. 3-1-2 MusashinoAkishima, Tokyo 196-8558JPJEOL Ltd.101936681ADC/P214122EP003-1-2 MusashinoAkishima, Tokyo 196-8558JPBoult Wade Tennant LLP101370347Salisbury Square House 8 Salisbury SquareLondon EC4Y 8APGBALATBEBGCHCYCZDEDKEEESFIFRGBGRHRHUIEISITLILTLULVMCMKMTNLNOPLPTRORSSESISKSMTR