LOW-RESISTIVITY METALLIC INTERCONNECT STRUCTURES WITH SELF-FORMING DIFFUSION BARRIER LAYERS

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EP 3 738 143 B8

(12)	CORRECTED EUROPEAN PATENT SPECIFICATION
	Note: Bibliography reflects the latest situation

(15)	Correction information:
	Corrected version no 1 (W1 B1)

(48)	Corrigendum issued on:
	10.07.2024 Bulletin 2024/28

(45)	Mention of the grant of the patent:
	29.05.2024 Bulletin 2024/22

(21)	Application number: 18899358.8

(22)	Date of filing: 18.12.2018

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International Patent Classification (IPC):

H01L 21/768^(2006.01)
H01L 23/532^(2006.01)

H01L 23/522^(2006.01)

(52)	Cooperative Patent Classification (CPC):
	H01L 23/53295; H01L 23/5226; H01L 23/53238; H01L 21/76846; H01L 21/76865; H01L 21/76867; H01L 21/7684; H01L 21/76831

(86)	International application number:
	PCT/IB2018/060227

(87)	International publication number:
	WO 2019/138280 (18.07.2019 Gazette 2019/29)

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LOW-RESISTIVITY METALLIC INTERCONNECT STRUCTURES WITH SELF-FORMING DIFFUSION BARRIER LAYERS

METALLISCHE VERBINDUNGSSTRUKTUREN MIT GERINGEM WIDERSTAND UND MIT SELBSTFORMENDEN DIFFUSIONSBARRIERESCHICHTEN

STRUCTURES D'INTERCONNEXION MÉTALLIQUES À FAIBLE RÉSISTIVITÉ AVEC COUCHES BARRIÈRES DE DIFFUSION À AUTO-FORMATION

(84)	Designated Contracting States:
	AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

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Priority:

12.01.2018 US 201815870213

(43)	Date of publication of application:
	18.11.2020 Bulletin 2020/47

(60)	Divisional application:
	24176141.0

(73)	Proprietor: Adeia Semiconductor Solutions LLC
	San Jose, CA 95134 (US)

(72)	Inventors:
	AMANAPU, Hari Prasad Albany, NY 12203 (US) PEETHALA, Cornelius Brown Albany, NY 12203 (US) PATLOLLA, Raghuveer, Reddy Albany, NY 12203 (US) YANG, Chih-Chao Albany, NY 12203 (US) NOGAMI, Takeshi Albany, NY 12203 (US)

(74)	Representative: Haley Guiliano International LLP
	26-28 Bedford Row London WC1R 4HE London WC1R 4HE (GB)

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References cited: :

WO-A1-2004/021434
CN-A- 1 239 823
CN-A- 102 856 299
US-A1- 2017 077 037

CN-A- 1 239 822
CN-A- 102 237 309
CN-A- 103 000 570
US-A1- 2017 092 589

Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).