(19)
(11) EP 3 743 539 A1

(12)

(43) Date of publication:
02.12.2020 Bulletin 2020/49

(21) Application number: 18701455.0

(22) Date of filing: 23.01.2018
(51) International Patent Classification (IPC): 
C23C 14/24(2006.01)
C23C 14/12(2006.01)
 C23C 14/26(2006.01)
C23C 14/56(2006.01)
(86) International application number:
PCT/EP2018/051540
(87) International publication number:
WO 2019/145014 (01.08.2019 Gazette 2019/31)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
MA MD TN

(71) Applicant: Applied Materials, Inc.
Santa Clara, California 95054 (US)

(72) Inventors:
  • ARMSTRONG, Claire
    63755 Alzenau (DE)
  • SCHNAPPENBERGER, Frank
    63867 Johannesberg (DE)
  • DEPPISCH, Thomas
    63743 Aschaffenburg (DE)
  • DIEGUEZ-CAMPO, Jose Manuel
    63457 Hanau (DE)
  • MAURISCHAT, Anja
    63768 Hösbach (DE)
  • SCHLÄFER, Susanne
    63654 Büdingen (DE)

(74) Representative: Zimmermann & Partner Patentanwälte mbB 
Postfach 330 920
80069 München
80069 München (DE)

   


(54) EVAPORATOR FOR EVAPORATING A SOURCE MATERIAL, MATERIAL DEPOSITION SOURCE, DEPOSITION APPARATUS AND METHODS THEREFOR