(19)
(11) EP 3 747 039 A1

(12)

(43) Date of publication:
09.12.2020 Bulletin 2020/50

(21) Application number: 19701686.8

(22) Date of filing: 01.02.2019
(51) International Patent Classification (IPC): 
H01L 21/20(2006.01)
(86) International application number:
PCT/EP2019/052516
(87) International publication number:
WO 2019/149895 (08.08.2019 Gazette 2019/32)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 02.02.2018 EP 18154882

(71) Applicant: Forschungsverbund Berlin E.V.
12489 Berlin (DE)

(72) Inventors:
  • LEWIS, Ryan
    Hamilton, Ontario L8L 7P2 (CA)
  • GEELHAAR, Lutz
    10117 Berlin (DE)

(74) Representative: v. Bezold & Partner Patentanwälte - PartG mbB 
Akademiestraße 7
80799 München
80799 München (DE)

   


(54) NANOELEMENT DEVICE WITH AT LEAST ONE NANOELEMENT FOR ELECTRICAL AND/OR OPTICAL COUPLING, AND METHOD OF MANUFACTURING THEREOF