(19)

(11)

EP 3 753 053 A1

(12)

(43) Date of publication: 23.12.2020 Bulletin 2020/52 (21) Application number: 19714884.4 (22) Date of filing: 13.02.2019

(51) International Patent Classification (IPC):  H01L 31/048(2014.01) H02S 20/26(2014.01) H01L 31/049(2014.01) H01L 31/0392(2006.01) (86) International application number: PCT/NL2019/050095 (87) International publication number: WO 2019/160412 (22.08.2019 Gazette 2019/34)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 13.02.2018 EP 18156581 (71) Applicant: Nederlandse Organisatie voor toegepast- natuurwetenschappelijk Onderzoek TNO 2595 DA 's-Gravenhage (NL)	(72) Inventors: KLERKS, Stan Anton Willem 2595 DA 's-Gravenhage (NL) SEWALT, Karl Everhardus 2595 DA 's-Gravenhage (NL) (74) Representative: V.O.  P.O. Box 87930 2508 DH Den Haag 2508 DH Den Haag (NL)