(19)
(11) EP 3 758 049 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
23.03.2022 Bulletin 2022/12

(45) Mention of the grant of the patent:
16.02.2022 Bulletin 2022/07

(21) Application number: 19182628.8

(22) Date of filing: 26.06.2019
(51) International Patent Classification (IPC): 
H01L 21/67(2006.01)
H01L 21/687(2006.01)
H01L 21/677(2006.01)
(52) Cooperative Patent Classification (CPC):
H01L 21/67173; H01L 21/6723; H01L 21/67718; H01L 21/67742; H01L 21/67751; H01L 21/68707; H01L 21/68764; H01L 21/67126; H01L 21/68785

(54)

DEVICE AND METHOD FOR MOVING AN OBJECT INTO A PROCESSING STATION, CONVEYING SYSTEM AND PROCESSING APPARATUS

VORRICHTUNG UND VERFAHREN ZUM BEWEGEN EINES OBJEKTS IN EINE BEARBEITUNGSSTATION, FÖRDERSYSTEM UND VERARBEITUNGSVORRICHTUNG

DISPOSITIF ET PROCÉDÉ POUR DÉPLACER UN OBJET DANS UNE STATION DE TRAITEMENT, SYSTÈME DE TRANSPORT ET APPAREIL DE TRAITEMENT


(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(43) Date of publication of application:
30.12.2020 Bulletin 2020/53

(73) Proprietor: Atotech Deutschland GmbH & Co. KG
10553 Berlin (DE)

(72) Inventor:
  • Pretscher, Rüdiger
    10553 Berlin (DE)

(74) Representative: Atotech Deutschland GmbH & Co. KG 
Intellectual Property Erasmusstraße 20
10553 Berlin
10553 Berlin (DE)


(56) References cited: : 
US-A1- 2004 037 682
US-A1- 2015 270 151
US-A1- 2014 245 954
US-A1- 2018 282 893
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).