(19)
(11) EP 3 762 959 A1

(12)

(43) Date of publication:
13.01.2021 Bulletin 2021/02

(21) Application number: 19712663.4

(22) Date of filing: 08.03.2019
(51) International Patent Classification (IPC): 
H01L 21/285(2006.01)
H01L 29/15(2006.01)
 H01L 21/768(2006.01)
(86) International application number:
PCT/US2019/021267
(87) International publication number:
WO 2019/173668 (12.09.2019 Gazette 2019/37)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 08.03.2018 US 201862640392 P

(71) Applicant: Atomera Incorporated
Los Gatos, CA 95032 (US)

(72) Inventors:
  • STEPHENSON, Robert John
    Cambridgeshire CB22 4PS (GB)
  • BURTON, Richard
    Phoenix, AZ 85048 (US)
  • CONNELLY, Daniel
    San Francisco, CA 94110 (US)
  • CODY, Nyles Wynn
    Tempe, AZ 85284 (US)
  • MEARS, Robert J.
    Wellesley, MA 02482 (US)
  • CHOUTOV, Dmitri
    Los Gatos, CA 95032 (US)
  • TRAUTMANN, Erwin
    San Jose, CA 95138 (US)

(74) Representative: Roberts, David 
Page White & Farrer Bedford House John Street
London WC1N 2BF
London WC1N 2BF (GB)

   


(54) SEMICONDUCTOR DEVICE INCLUDING ENHANCED CONTACT STRUCTURES HAVING A SUPERLATTICE AND RELATED METHODS