(19)

(11)

EP 3 775 313 A1

(12)

(43) Date of publication: 17.02.2021 Bulletin 2021/07 (21) Application number: 19717311.5 (22) Date of filing: 11.04.2019

(51) International Patent Classification (IPC):  C23C 14/04(2006.01) C23C 14/34(2006.01) C23C 14/56(2006.01) C23C 14/08(2006.01) H01J 37/34(2006.01) (86) International application number: PCT/EP2019/059196 (87) International publication number: WO 2019/197512 (17.10.2019 Gazette 2019/42)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 13.04.2018 GB 201806124 (71) Applicant: Oxford University Innovation Limited Botley Oxford OX2 0JB (GB)	(72) Inventors: JAIN, Himanshu Oxfordshire OX1 3QR (GB) EDWARDS, Peter Oxfordshire OX1 3QR (GB) (74) Representative: Barker Brettell LLP  100 Hagley Road Edgbaston Birmingham B16 8QQ Birmingham B16 8QQ (GB)