(19)

(11)

EP 3 785 078 A1

(12)

(43) Date of publication: 03.03.2021 Bulletin 2021/09 (21) Application number: 19717494.9 (22) Date of filing: 17.04.2019

(51) International Patent Classification (IPC):  G03F 7/20(2006.01) G01M 11/00(2006.01) G21K 1/06(2006.01) (86) International application number: PCT/EP2019/059944 (87) International publication number: WO 2019/206767 (31.10.2019 Gazette 2019/44)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 26.04.2018 EP 18169481 (71) Applicant: ASML Netherlands B.V. 5500 AH Veldhoven (NL)	(72) Inventor: FRANKEN, Johannes, Christiaan, Leonardus 5500 AH Veldhoven (NL) (74) Representative: ASML Netherlands B.V.  Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven 5500 AH Veldhoven (NL)