ATBECHDEDKESFRGBGRITLILUNLSEMCPTIESILTLVFIROMKCYALTRBGCZEEHUPLSKBAHRIS..MTNORSMESMMAKHTNMD..........*XBDM Ver 1.7.2 (20 November 2019) - 1100000/03791422A120210317EP19799561.62019041720201112enenen20181597540020180509US2021031720211120210317202111H01J 37/34 20060101AFI20191115BHEP C23C 14/35 20060101ALI20191115BHEP deKAMMERINTERNTER ELEKTROMAGNET FÜR PHYSIKALISCHE AUFDAMPFUNGenPHYSICAL VAPOR DEPOSITION IN-CHAMBER ELECTRO-MAGNETfrÉLECTRO-AIMANT EN CHAMBRE DE DÉPÔT PHYSIQUE EN PHASE VAPEURApplied Materials, Inc.10111705927743R-EP 256213050 Bowers AvenueSanta Clara, CA 95054USWEST, Brian, T.4780 Grimsby DriveSan Jose, CA 95130USCOX, Michael, S.7090 Church St.Gilroy, CA 95020USGELO, Miroslav6052 Tazetta DriveOakley, CA 94561USSOMANNA, Dinkesh400 East Remington Dr. Apt. D313Sunnyvale, CA 94087USZimmermann & Partner Patentanwälte mbB101453848Postfach 330 92080069 MünchenDEALATBEBGCHCYCZDEDKEEESFIFRGBGRHRHUIEISITLILTLULVMCMKMTNLNOPLPTRORSSESISKSMTRBAMEKHMAMDTNUS201902795520190417enWO201921704620191114201946