(19)

(11)

EP 3 802 913 A1

(12)

(43) Date of publication: 14.04.2021 Bulletin 2021/15 (21) Application number: 19820430.7 (22) Date of filing: 11.06.2019

(51) International Patent Classification (IPC):  C23C 16/32(2006.01) C23C 16/40(2006.01) C23C 16/50(2006.01) H01L 21/02(2006.01) C23C 16/34(2006.01) C23C 16/30(2006.01) C23C 16/448(2006.01) (86) International application number: PCT/US2019/036456 (87) International publication number: WO 2019/241183 (19.12.2019 Gazette 2019/51)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 11.06.2018 US 201862683142 P 06.06.2019 US 201916433585 (71) Applicant: Versum Materials US, LLC Tempe, AZ 85284 (US)	(72) Inventors: RIDGEWAY, Robert G. Tempe, Arizona 85284 (US) VRTIS, Raymond N. Tempe, Arizona 85284 (US) RAO, Madhukar B. Tempe, Arizona 85284 (US) (74) Representative: Beck Greener LLP  Fulwood House 12 Fulwood Place London WC1V 6HR London WC1V 6HR (GB)