| (84) |
Designated Contracting States: |
|
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
|
Designated Extension States: |
|
BA ME |
|
Designated Validation States: |
|
KH MA MD TN |
| (30) |
Priority: |
28.03.2018 US 201862648969 P
|
| (71) |
Applicant: ASML Netherlands B.V. |
|
5500 AH Veldhoven (NL) |
|
| (72) |
Inventors: |
|
- DRIESSEN, Theodorus, Wilhelmus
San Diego, California 92127 (US)
- ERSHOV, Alexander, Igorevich
San Diego, California 92127 (US)
- ROLLINGER, Bob
San Diego, California 92127 (US)
- VASCHENKO, Georgiy O.
San Diego, California 92127 (US)
- WINKELS, Koen, Gerhardus
5500 AH Veldhoven (NL)
- TREES, Dietmar, Uwe, Herbert
San Diego, California 92127 (US)
|
| (74) |
Representative: ASML Netherlands B.V. |
|
Corporate Intellectual Property
P.O. Box 324
5500 AH Veldhoven
5500 AH Veldhoven (NL) |
|
