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(11)

EP 3 811 416 A1

(12)

(43) Date of publication: 28.04.2021 Bulletin 2021/17 (21) Application number: 19749925.4 (22) Date of filing: 19.07.2019

(51) International Patent Classification (IPC):  H01L 29/778(2006.01) H01L 29/417(2006.01) H01L 29/872(2006.01) H01L 29/20(2006.01) (86) International application number: PCT/US2019/042623 (87) International publication number: WO 2020/018915 (23.01.2020 Gazette 2020/04)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 19.07.2018 US 201816039887 19.07.2018 US 201816040230 19.07.2018 US 201816039866 19.07.2018 US 201816039900 19.07.2018 US 201816040255 (71) Applicant: MACOM Technology Solutions Holdings, Inc. Lowell, Massachusetts 01851 (US)

(72) Inventors: BOLES, Timothy, E. Tyngsboro, MA 01879 (US) STRUBLE, Wayne, Mack Franklin, MA 02038 (US) LINTHICUM, Kevin, J. Cary, NC 27511 (US) (74) Representative: Cabinet Beaumont  4, Place Robert Schuman B.P. 1529 38025 Grenoble Cedex 1 38025 Grenoble Cedex 1 (FR)