(19)
(11) EP 3 821 298 A1

(12)

(43) Date of publication:
19.05.2021 Bulletin 2021/20

(21) Application number: 19710175.1

(22) Date of filing: 22.02.2019
(51) International Patent Classification (IPC): 
G03F 7/16(2006.01)
H01L 31/0224(2006.01)
 H01L 21/027(2006.01)
H01L 31/18(2006.01)
(86) International application number:
PCT/SE2019/050162
(87) International publication number:
WO 2019/164443 (29.08.2019 Gazette 2019/35)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 22.02.2018 SE 1850194

(71) Applicant: Solibro Research AB
756 51 Uppsala (SE)

(72) Inventors:
  • LOTFI, Sara
    753 31 UPPSALA (SE)
  • MATHIASSON, Johan
    752 67 UPPSALA (SE)

(74) Representative: Theander, Anna Katarina Henrietta 
Rouse AB Docketing, PO Box 42
683 21 Hagfors
683 21 Hagfors (SE)

   


(54) METHOD FOR PATTERNING A SURFACE WITH A METAL BY CONTROLLING THE GENERATION OF CRACKS OR GAPS IN A DEPOSITED METAL LAYER